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문희규,심영석,김도홍,류정호,김진상,박형호,박동수,윤석진,장호원,Moon, Hi-Gyu,Shim, Young-Seok,Kim, Do-Hong,Ryu, Jung-Ho,Kim, Jin-Sang,Park, Hyung-Ho,Park, Dong-Soo,Yoon, Seok-Jin,Jang, Ho-Won 한국전기전자재료학회 2012 전기전자재료학회논문지 Vol.25 No.8
Multifunctional structures with two kinds of materials have been intensively investigated in order to improve their electrical characteristic with two functions simultaneously. However, the research regarding of multifunctional ceramic sensor is still in a preliminary stage and how to integrate them with low-cost and high-yield mass production process remains a challenge issue. In this study, we fabricated the multifunctional ceramic sensor composed of temperature and gas sensors. Moreover, we investigated the CO sensing properties of three dimensional nanostuctured $Nb_2O_5$ thin film gas sensors fabricated with silica ($SiO_2$ nanosphere (${\O}$= 750 nm). Compared to plain films, the nanostructured films show enhanced gas sensing of greater sensitivity and a faster response. This result reveals that significantly increased sensitivity is an increase in the effective surface area for the adsorption of gas molecules.