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NiO를 첨가한 WO<sub>3</sub> 박막의 미세 구조 거동
김광호,나동명,최광표,박진성,Kim Gwang-Ho,Na Dong-Myong,Choi Gwang-Pyo,Park Jin-Seong 한국재료학회 2005 한국재료학회지 Vol.15 No.7
Thin films of tungsten oxide and nickel oxide were deposited on $Al_2O_3/Si-substrate$ by high vacuum thermal evaporation. The properties of microstructure and crystallinity were analyzed by SEM and XRD respectively. $WO_3$ films without addition of NiO showed polycrystalline structure after annealing at $500^{\circ}C$ for SO min. There were the cracks between the polycrystalline grains and the crack width was increased with the thickness of $WO_3$ films. The cracks in the $WO_3$ films could be controlled by an optimum deposition of NiO on $WO_3$ films and either less or more than the optimum addition fails to suppress the cracks. A process mechanism to suppress the crack has been discussed.
Thermal Evaporation 법에 의해 제조된 WO3 박막과 NiO-WO3 박막의 전기적 특성에 관한 연구
나은영,나동명,박진성 한국전기화학회 2005 한국전기화학회지 Vol.8 No.1
WO3 and NiO-WO3 thin films were deposited on a Si (100) substrate by using high vacuum thermal evaporation. The effects of various film thicknesses on the surface morphology WO3 and NiO-WO3 thin films were investigated. X-ray diffraction (XRD), Scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) were employed to characterize the deposited films. The results suggest that as WO3 thin films became thick, certain size of grain grew. On the other hand, their grain grew up to a certain size(?) NiO-dopint to WO3 thin films inhibited the grain growth five times less than undoped WO3 thin films. doping This results show that NiO dope inhibited the grain growth of WO3 thin films. Also, the variation of doping growing NOx sensitivity(RNOx/Rair) to the thickness of WO3 and NiO-WO3 thin films were measured according to the thickness change of thin films and the working temperature of sensor in 5 ppm NOx gas. As a result, NiO-WO3 thin films showed more excellent properties than WO3 thin films for NOx sensitivity.
Thermal Evaporation법에 의해 제조된 WO<sub>3</sub> 박막과 NiO-WO<sub>3</sub>박막의 전기적 특성에 관한 연구
나은영,나동명,박진성,Na Eun-young,Na Dong-myong,Park Jin-seong 한국전기화학회 2005 한국전기화학회지 Vol.8 No.1
본 연구는 $WO_3$ 박막과 $NiO-WO_3$ 박막을 고진공 저항가열식 thermal evaporation 법으로 (100) n형의 실리콘 단결정 기판 위에 증착시켰고, 막의 결정성 증진을 위하여 공기 중 $500^{\circ}C$에서 30분 동안 열처리하였다. 박막의 결정성 및 결정구조를 분석하기 위해서 X선 회절분석기를 사용하였고, 표면 및 단면 관찰을 위해서는 주사전자현미경을 이용하였다. 그리고 화학 조성 결합에너지는 XPS를 이용하였다. 순수 $WO_3$ 박막의 결정 크기는 $500^{\circ}C$에서 30분 동안 공기중 열처리에 의해서 $0.6{\mu}m$로 성장하였고 $WO_3$ 박막의 두께가 증가할수록 거의 변화 없이 일정하였다. 반면, NiO가 첨가된 $WO_3$ 박막 두께별 결정크기는 각각 $0.12{\mu}m,\;0.28{\mu}m,\;0.32{\mu}m$및 $0.43{\mu}m$로 순수 $WO_3$ 박막에 비해 치밀한 표면을 형성하였고, 최대 5배정도 성장이 억제되었다. 가스감도 측정은 대기 중에서의 센서 저항 값을 기준으로 측정가스 저항 값의 비율 $(R_{NOx}/R_{air})$로 가스감도를 나타내었다. 전기적 성질은 MFC로 NOx가스 5ppm을 일정히 유지시켰고, Multimeter로 계측하여 컴퓨터에 자동 계측되는 시스템을 사용하였다. 순수 $WO_3$박막보다는 $NiO-WO_3$ 박막이 우수한 NOx 감도특성을 보였고 센서의 작동온도는 $250^{\circ}C$에서 우수한 감도를 나타내었다. [ $WO_3$ ] and $NiO-WO_3$ thin films were deposited on a Si (100) substrate by using high vacuum thermal evaporation. The effects of various film thicknesses on the surface morphology $WO_3$ and $NiO-WO_3$ thin films were investigated. X-ray diffraction (XRD), Scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy(XPS) were employed to characterize the deposited films. The results suggest that as $WO_3$ thin films became thick, their grain grew up to a $0.6{\mu}m$. On the other hand, NiO-doping to $WO_3$ thin films inhibited the grain growth five times less than undoped $WO_3$ thin films. This results show that NiO doping inhibited the grain growing of $WO_3$ thin films. Also, the variation of NOx sensitivity $(R_{NOx}/R_{air})$ to the thickness of $WO_3$ and $NiO-WO_3$ thin films were measured according to the thickness change of thin films and the working temperature of sensor in 5ppm NOx gas. As a result, $NiO-WO_3$ thin films showed more excellent properties than $WO_3$ thin films for NOx sensitivity.
한상훈,노효섭,나동명,김광호,이운영,박진성,Han, Sang-Hoon,Noh, Hyo-Seop,Na, Dong-Myung,Jin, Guang-Hu,Lee, Woon-Young,Park, Jin-Seong 한국세라믹학회 2011 한국세라믹학회지 Vol.48 No.1
In order to fabricate 8YSZ thick film by silk screen printing, YSZ(yttria-stabilized zirconia) commercial powder was used as starting materials. Paste for screen printing was made by mixing 8YSZ powder and organic vehicles. 8YSZ thick film was formed on $Al_2O_3$ substrate. The crystal structure, and microstructure were investigated. Grain size of 8YSZ was increased with increasing calcination temperature and rapid grain growth was shown after calcination at $1300^{\circ}C$. Microstructure showed the mixture of large and small grain size after $1400^{\circ}C$ sintering. Shrinkage rate of 8YSZ thick film sintered at $1400^{\circ}C$ was more than 40%.
균일 침전법을 이용한 SnO2 나노 분말 제조와 CO 가스 감지 특성
김영복 ( Young Bok Kim ),나동명 ( Dong Myoung Na ),이운영 ( Woon Young Lee ),박진성 ( Jin Seong Park ) 조선대학교 공학기술연구원 2008 공학기술논문지 Vol.1 No.2
Nano sized SnO2 particles were synthesized by a homogeneous precipitation method using tin chloride(SnCI4·5H2O) and urea(CO(NH2)2). The powders were heated at temperature of 500℃ and 600℃ for 2 h. The structural properties were characterized by preforming X-ray Diffraction and scanning electron microscopy respectively. The CO sensing properties were measured as a function of doping concentrations of Sb2O3 and Pt. The resistance was decreased with the amount of Sb2O3 while the sensitivity for CO gas was increased with the amount of Pt.