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빔 쉐이핑을 이용한 펨토초 레이저 ITO 박막 가공 깊이 제어에 대한 연구
김훈영,윤지욱,최원석,황경현,조성학,Kim, Hoon-Young,Yoon, Ji-Wook,Choi, Won-Seok,Stolberg, Klaus,Whang, Kyoung-Hyun,Cho, Sung-Hak 한국레이저가공학회 2014 한국레이저가공학회지 Vol.17 No.1
Indium tin oxide (ITO) is an important transparent conducting oxide (TCO). ITO films have been widely used as transparent electrodes in optoelectronic devices such as organic light-emitting devices (OLED) because of their high electrical conductivity and high transmission in the visible wavelength. Finding ways to control ITO micromachining depth is important role in the fabrication and assembly of display field. This study presented the depth control of ITO patterns on glass substrate using a femtosecond laser and slit. In the proposed approach, a gaussian beam was transformed into a quasi-flat top beam by slit. In addition, pattern of square type shaped by slit were fabricated on the surfaces of ITO films using femtosecond laser pulse irradiation, under 1030nm, single pulse. Using femtosecond laser and slit, we selectively controlled forming depth and removed the ITO thin films with thickness 145nm on glass substrates. In particular, we studied the effect of pulse number on the ablation of ITO. Clean removal of the ITO layer was observed when the 6 pulse number at $2.8TW/cm^2$. Furthermore, the morphologies and fabricated depth were characterized using a optical microscope, atomic force microscope (AFM), and energy dispersive X-ray spectroscopy (EDS).
펨토초 레이저 기반 투명유리(BK7) 내부의 컬러 미세형상 가공
김훈영(Hoon-Young Kim),윤지욱(Ji-Wook Yoon),최원석(Won-Seok Choi),박정규(Jung-Kyu Park),최지연(Jiyeon Choi),김재구(Jae-Goo Kim),황경현(Kyoung Hyun Whang),조성학(Sung-Hak Cho) 한국레이저가공학회 2012 한국레이저가공학회지 Vol.15 No.3
We have successfully formed brown colored patterns inside of a transparent borosilicate glass generally known as BK7, laying the focus of near infrared Ti: sapphire femtosecond laser beam in the bulk BK7 glass. It is important to keep the laser power well below the damage threshold of BK7 in forming the color center. According to the low laser power, there was no laser induced mechanical damage such as cracks or threads in the color formed area. From the absorbance spectrum and its gaussian fitting, we found the band gap of BK7, 4.21eV, and three absorption edges.
AMOLED 제조공정에 사용되는 Fine Metal Mask 용 얇은 Invar 합금의 진동자를 이용한 펨토초 레이저 응용 홀 드릴링
최원석,김훈영,신영관,최준하,장원석,김재구,조성학,최두선,Choi, Won-Suk,Kim, Hoon-Young,Shin, Young-Gwan,Choi, Jun-ha,Chang, Won-Seok,Kim, Jae-Gu,Cho, Sung-Hak,Choi, Doo-Sun 한국금형공학회 2020 한국금형공학회지 Vol.14 No.3
One of display trends today is development of high pixel density. To get high PPI, a small size of pixel must be developed. RGB pixel is arranged by evaporation process which determines pixel size. Normally, a fine metal mask (FMM; Invar alloy) has been used for evaporation process and it has advantages such as good strength, and low thermal expansion coefficient at low temperature. A FMM has been manufactured by chemical etching which has limitation to controlling the pattern shape and size. One of alternative method for patterning FMM is laser micromachining. Femtosecond laser is normally considered to improve those disadvantages for laser micromachining process due to such short pulse duration. In this paper, a femtosecond laser drilling for thickness of 16 ㎛ FMM is examined. Additionally, we introduce experimental results for controlling taper angle of hole by vibration module adapted in laser system. We used Ti:Sapphire based femtosecond laser with attenuating optics, co-axial illumination, vision system, 3-axis linear stage and vibration module. By controlling vibration amplitude, entrance and exit diameters are controllable. Using vibrating objective lens, we can control taper angle when femtosecond laser hole drilling by moving focusing point. The larger amplitude of vibration we control, the smaller taper angle will be carried out.