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플라즈마 화학증착법에서 증착변수가 TiN 증착에 미치는 영향(III) -r.f. power 및 전극간 거리를 중심으로-
김충환,신영식,김문일,Kim, C.H.,Shin, Y.S.,Kim, M.I. 한국열처리공학회 1990 熱處理工學會誌 Vol.3 No.1
To investigate the influence of r.f. power and electrode distance on the TiN deposition, TiN films were deposited onto STC3, STD11 steel and Si-wafer from gas mixtures of $TiC_4/N_2/H_2$ using the radio frequency plasma assisted chemical vapor deposition. The crystallinity of TiN film could be improved by the increase of r.f. power and the decrease of electrode distance. The TiN coated layer contains chlorine, its content were decreased with increasing r.f. power as well as decreasing electrode distance. And the thickness of deposited TiN was largely affected by r.f. power and electrode distance. The hardness of deposited TiN reached a maximum value of about Hv 2,000.
인쇄 방식으로 제작된 RFID 태그 안테나의 공진주파수 특성
김충환(Chung Hwan Kim),이용식(Yong Sik Lee),김영국(Young Kook Kim),김동수(Dong Soo Kim),최병오(Byung Oh Choi) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.10
Recently, a great deal of research is focused on the printed electronics and one of the mainly concerned products is printed RFID tag. In special, low-cost RFID tag is necessarily required for the application to all products and goods as a substitution for bar-codes. The first step to realize low-cost RFID tag is printed antenna that is produced by printing process instead of conventional copper/aluminum etching methods. Because of quality variation and printing badness, performance of the printed RFID antenna is lower than that of existent antenna manufactured by conventional etching methods. In this paper, printing parameters which can affect the resonant frequency are examined. The most serious parameter is the non-uniformity of the edge and the resonant frequency is greatly affected by the non-uniformity.