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Yebing Tian,Zhaowei Zhong,Jun Hao Ng 한국정밀공학회 2013 International Journal of Precision Engineering and Vol. No.
Chemical mechanical polishing (CMP) with fixed abrasive pad is an alternative machining method to loose abrasive lapping and partial polishing with traditional pad in the fabrication of optical silicon substrates. However, the effects of chemical slurry on the fixed abrasive polishing performance are not fully understood. In this work, a serial of CMP experiments with a fixed abrasive pad were carried out for optical silicon substrates using seven different chemical slurries i.e. de-ionized water, alkaline lubricant, colloidal silica, hydrogen peroxide (H2O2) and potassium hydroxide (KOH). The polishing performances of these slurries were evaluated and compared in terms of material removal rate (MRR), surface roughness and flatness of the polished silicon substrates. The polishing characteristics were also discussed to reveal material removal mechanism and silicon surface generation under different chemical environments.
Guangming Zheng,Xiang Cheng,Li Li,Rufeng Xu,Yebing Tian 대한기계학회 2019 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.33 No.1
The high-speed dry milling of AISI 4340 steel was carried out with a CVD Al 2 O 3 /TiCN coated carbide tool. The relationships between cutting force, surface roughness and cutting parameter were conducted, and the influence of tool wear on cutting force and surface roughness was also investigated. The wear mechanism of coated tool was revealed by SEM micrograph and EDS analysis. Due to the lower tool wear rate, the increase of cutting forces and surface roughness R a was smaller at the initial wear stage and the steady wear stage, whereas the increase of cutting forces was improved suddenly when the flank wear was more than 0.25 mm. Additionally, the coated tool wear was mainly caused by adhesion, abrasion, oxidation and diffusion, accompanied with a little peeling and chipping. The research results are expected to provide optimum cutting parameters for high-efficiency machining of high-strength steel.