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ALUMINUM BIAS SPUTTERING FOR FILM COVERAGE IMPROVEMENT
Kobayashi.Shigeru,Shimamura, Hideaki,Sakata, Masao,Fujita, Shouyou,Yajima, Akira,Saito, Hiroshi,Tateishi, Hideki,Sasaki, Shinji 대한전자공학회 1989 ICVC : International Conference on VLSI and CAD Vol.1 No.1
A filter was installed between the sputtering target and the substrate so as to reduce the aluminum deposition arriving with a shallow angle at the substrate in order to study the step coverage improvement by the bias application. It is deduced that the aluminum flowage occurs so that the surface energy is minimized around the via hole. Aluminum films deposited with the pulsed biasing were characterized in which the possible microstructual damage by argon bombardment is to be minimized. This biasing technique should provide with a better process for the step coverage improvement. A sputtering cathode was developed for aluminum bias sputtering which has a substrate current capability as high as 2A for a 5 inch wafer at the substrate voltage around-50V.
Yano Yudai,Iwata Eiichiro,Sada Takuya,Ueno Yuki,Hyakuda Yoshinobu,Kawasaki Sachiko,Okuda Akinori,Shigematsu Hideki,Uematsu Kota,Yajima Hiroshi,Tanaka Yasuhito 대한척추외과학회 2022 Asian Spine Journal Vol.16 No.6
Study Design: Retrospective cohort study.Purpose: We propose a method for screening for low bone mineral density (BMD) among perimenopausal and postmenopausal women using a self-reported questionnaire.Overview of Literature: Osteoporosis is a major health problem worldwide. However, it is not cost-effective to evaluate BMD in all patients. Although several tools for predicting osteoporosis have been established, they do not focus much on low BMD prior to the development of osteoporosis.Methods: We retrospectively reviewed the medical records of 198 women aged 40–70 years who underwent mass screening for osteoporosis at our hospital between 2016 and 2019. The BMD values and the following data were collected: age, body mass index, fracture history, lower back pain, height loss, kyphosis, history of fragility fracture, family history of vertebral or hip fracture, and menopause. The reliability of each data point for the young adult mean <80% was calculated using discriminant analysis. Variables with large weight coefficients were selected and scored. This scoring tool was examined, and a cutoff score for predicting the young adult mean <80% was determined.Results: Sixty-four participants (32.3%) had a young adult mean <80%. According to the weight coefficients, the following five variables were scored as follows: age ≥60 years 3 points, body mass index <22 kg/m2 3 points, lower back pain 1 point, height loss (cm) 1 point, and menopause 1 point. The area under the receiver operating characteristic curve was 0.738 (95% confidence interval, 0.669–0.807). At cutoff scores of ≥5 and <5, the sensitivity was 82.8%, with specificity of 52.0%.Conclusions: The scoring tool performed well for predicting young adult mean <80% among perimenopausal and postmenopausal women in Japan. This tool may be useful to screen for low BMD.