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Effect of Counter-doping Thickness on Double-gate MOSFET Characteristics
George James T,Saji Joseph,Vincent Mathew 대한전자공학회 2010 Journal of semiconductor technology and science Vol.10 No.2
This paper presents a study of the influence of variation of counter doping thickness on short channel effect in symmetric double-gate (DG) nano MOSFETs. Short channel effects are estimated from the computed values of current-voltage (I-V) characteristics. Two dimensional Quantum transport equations and Poisson equations are used to compute DG MOSFET characteristics. We found that the transconductance (gm) and the drain conductance (gd) increase with an increase in p-type counter-doping thickness (Tc). Very high value of transconductance (gm= 38 mS/㎛) is observed at 2.2 ㎚ channel thickness. We have established that the threshold voltage of DG MOSFETs can be tuned by selecting the thickness of counter-doping in such device.
Threshold Voltage Control through Layer Doping of Double Gate MOSFETs
Saji Joseph,George James T,Vincent Mathew 대한전자공학회 2010 Journal of semiconductor technology and science Vol.10 No.3
Double Gate MOSFETs (DG MOSFETs) with doping in one or two thin layers of an o therwise intrinsic channel are simulated to obtain the transport characteristics, threshold voltage and leakage current. Two different device structures- one with doping on two layers near the top and bottom oxide layers and another with doping on a single layer at the centre- are simulated and the variation of device parameters with a change in doping concentration and doping layer thickness is studied. It is observed that an n-doped layer in the channel reduces the threshold voltage and increases the drive current, when compared with a device of undoped channel. The reduction in the threshold voltage and increase in the drain current are found to increase with the thickness and the level of doping of the layer. The leakage current is larger than that of an undoped channel, but less than that of a uniformly doped channel. For a channel with p-doped layer, the threshold voltage increases with the level of doping and the thickness of the layer, accompanied with a reduction in drain current. The devices with doped middle layers and doped gate layers show almost identical behavior, apart from the slight difference in the drive current. The doping level and the thickness of the layers can be used as a tool to adjust the threshold voltage of the device indicating the possibility of easy fabrication of ICs having FETs of different threshold voltages, and the rest of the channel, being intrinsic having high mobility, serves to maintain high drive current in comparison with a fully doped channel.