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고출력 레이저 어블레이션에 의한 실리콘 가공시 발생하는 상폭발현상에 관한 연구
정성호,Yoo, J.H.,Greif, R.,Russo, R.E. 한국레이저가공학회 2000 한국레이저가공학회지 Vol.3 No.3
The volume and depth of the craters produced on silicon samples during high power laser ablation show a strong nonlinear change as the laser irradiance in closes across a threshold value, approximately 2.2X1010 W/cm². Time-resolved shadowgraph images of the ablation plume reveal the ejection of large particulates from the sample for laser irradiance above the threshold, with a time delay of about 300-400 ns. The numerically estimated thickness of the superheated liquid layer, considering the transformation of liquid metal into liquid dielectric near the critical state, agrees with the measured agrees with crater depths. It is suggested that a phase explosion of the deep superheated liquid layer near the critical state is responsible for the measured sudden increase of crater volume and the ejection of large particulates.
펨토초 및 나노초 레이저를 이용한 박막태양전지의 레이저 플라즈마 분광 분석
이석희,최장희,정성호,Lee, S.H.,Choi, J.H.,Gonzalez, J.J.,Hou, H.,Zorba, V.,Russo, R.E.,Jeong, S.H. 한국레이저가공학회 2014 한국레이저가공학회지 Vol.17 No.4
In this work, the application of laser induced breakdown spectroscopy (LIBS) for the composition analysis of thin $Cu(In,Ga)Se_2$ (CIGS) solar cell films ($1-2{\mu}m$ thickness) is reported. For the ablation of CIGS films, femtosecond (fs) laser (wavelength = 343nm, pulse width = 500fs) and nanosecond (ns) laser (wavelength = 266nm, pulse width = 5ns) were used under atmospheric environment. The emission spectra were detected with an intensified charge coupled device (ICCD) spectrometer and multichannel CCD spectrometer for fs-LIBS and ns-LIBS, respectively. The calibration curves for fs-LIBS and ns-LIBS intensity ratios of Ga/Cu, In/Cu, and Ga/In were generated with respect to the concentration ratios measured by inductively coupled plasma optical emission spectrometry (ICP-OES).