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이선우,이동주,이응숙,제태진 한국공작기계학회 2001 한국공작기계학회 춘계학술대회논문집 Vol.2001 No.-
The needs for precision machining of micro to milli parts have been increased as the industry require high quality products, especially for the micro-machining of IT products. The ultra-precision machining system is essential for the micro machining of fine structures, which insures machining accuracy, low systematic and random error and repeatability. In this study, we developed micro machining system, which is equipped with air bearing stage for ultra precision machining and also we present the results of V-grooving experiments, conducted by the developed system, to verify the performance of system. The results show that the machined V-grooving had good accuracy with repeatable stability.
마이크로 드릴링 M/C에 의한 미세구멍가공특성에 관한 연구
민승기,이동주,이응숙,강재훈,김동우 한국공작기계학회 2001 한국공작기계학회 춘계학술대회논문집 Vol.2001 No.-
Recently, the trends of industrial products grow more miniaturization, variety and mass production. Micro drilling which take high precision in cutting work is requested more micro hole and high speed working. Especially, Micro deep hole drilling is becoming more important in a wide spectrum of precision production industries, ranging from the production of automotive fuel injection nozzle, watch and camera parts, medical needles, and thick multi-layered Printed Circuit Boards(PCB) that are demanded for very high density electric circuitry. This paper shows the tool monitoring results of micro drill with tool dynamometer. And additionally, microscope with built-in monitor inspection show the relationship between burr in work piece and chip form of micro drill machining.
윤종호,이재종,이응숙,이동주,김영호 한국공작기계학회 2004 한국공작기계학회 춘계학술대회논문집 Vol.2004 No.-
Electro-rheological fluid is recently used for the micro polishing of 3-dimensional micro-aspherical lens. It's also used for polishing small area defects on the wide flat wafer. Since ER fluid shows a behavior of viscosity changing under certain electric fields, micro polishing efficiency may be enhanced for certain cases. In this paper, a perfluorinated carbonyl fluoride oil based ER fluids was used to improve surface polishing rate and submicron-scale accuracy. As the polishing electrodes, micro size cylindrical tools had been used for maximizing the electric field. An experimental device, which was applied for micro polishing a number of wafers of 4 inches in size and other workpieces, was made on a precision polishing system. It consisted of a steel electrode, a wafer fixture, 10mA current and DC 5kV power supply unit, and a controller unit. From the Experiments, the ER fluid is applicable for micro polishing of small parts.
Ruled Surface로 형성된 임펠러 블레이드의 5-축 가공에 관한 연구
정대일,조현덕,윤문철,최두선,신보성,이응숙 한국공작기계학회 2000 한국공작기계학회 추계학술대회논문집 Vol.2000 No.-
This paper describes the method and the process for impeller machining on 5-axis CNC machining center. Also, The CAD/CAM software for the impeller post processing is developed. The software can be interfaced with Solid-works software for confirmation of the impeller shapes. In this study, blades on impeller is described from Ruled-surfaces between two Ferguson curves. In this study, using 5-axis NC part program obtained from the developed software, a sample impeller was machined on 5-axis CNC machining center. The machined impeller was very agreeable to the designed impeller. Thus, theories proposed in this study can be very useful for the 5-axis machining of impeller blades with Ruled-surfaces.
Fabrication of UV imprint stamp using diamond-like carbon coating technology
EUNG-SUG LEE(이응숙),JUN-HO JEONG(정준호),KI-DON KIM(김기돈),YOUNG-SUK SIM(심영석),DAE-GEUN CHOI(최대근),JUNHYUK CHOI(최준혁),TAE-WOO LIM(임태우),SANG-HU PARK(박상후),DONG-YOL YANG(양동열),NAM-GOO CHA(차남구),IN-KWON KIM(김인권),JIN- 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.11
The two-dimensional (2D) and three-dimensional (3D) diamond-like carbon (DLC) stamps for ultraviolet nanoimprint lithography (UV-NIL) were fabricated using two kinds of methods, which were a DLC coating process followed by the focused ion beam (FIB) lithography and the two-photon polymerization (TPP) patterning followed by nano-scale thick DLC coating. We fabricated 70 ㎚ deep lines with a width of 100 ㎚ and 70 ㎚ deep lines with a width of 150 ㎚ on 100 ㎚ thick DLC layers coated on quartz substrates using the FIB lithography. 200 ㎚ wide lines, 3D rings with a diameter of 1.35 ㎛ and a height of 1.97 ㎛, and a 3D cone with a bottom diameter of 2.88 ㎛ and a height of 1.97 ㎛ were successfully fabricated using the TPP patterning and DLC coating process. The wafers were successfully printed on an UV-NIL using the DLC stamp. We could see the excellent correlation between the dimensions of features of stamp and the corresponding imprinted features.
High-throughput step-and-repeat UV-nanoimprint lithography
Eung-sug Lee,Jun-ho Jeong,Young-suk Sim,Ki-don Kim,Dae-geun Choi,Jun-hyuk Choi 한국물리학회 2006 Current Applied Physics Vol.6 No.1l
UV-NIL has shown promise as new disruptive technology to displace photolithography in patterning nano features. This method is attractive because of their high-throughput with easy operation at room temperature and low pressure with low-cost. In this paper, a new UV-NIL process is proposed to apply a large-area stamp to a high-throughput step-and-repeat process at atmospheric conditions, utilizing additive gas pressurization and an elementwise patterned stamp (EPS), which consists of elements separated by channels. With the proposed method, only four imprints were required to press an 8 in. wafer. EPS features measuring 50–80 nm were successfully transferred onto the wafers. The experiments demonstrated that a 5 · 5 in.2. EPS could be used with a step-and-repeat UV-NIL process to imprint 8 in. wafers under atmospheric conditions.
Fabrication of Nano- and Micro-Scale UV Imprint Stamp Using Diamond-Like Carbon Coating Technology
Lee, Eung-Sug,Jeong, Jun-Ho,Kim, Ki-Don,Sim, Young-Suk,Choi, Dae-Geun,Choi, Junhyuk,Park, Sang-Hu,Lim, Tae-Woo,Yang, Dong-Yol,Cha, Nam-Goo,Park, Jin-Goo,Lee, Wi-Ro American Scientific Publishers 2006 Journal of Nanoscience and Nanotechnology Vol.6 No.11
<P>Two-dimensional (2-D) and three-dimensional (3-D) diamond-like carbon (DLC) stamps for ultraviolet nanoimprint lithography were fabricated with two methods: namely, a DLC coating process, followed by focused ion beam lithography; and two-photon polymerization patterning, followed by nanoscale-thick DLC coating. We used focused ion beam lithography to fabricate 70 nm deep lines with a width of 100 nm, as well as 70 nm deep lines with a width of 150 nm, on 100 nm thick DLC layers coated on quartz substrates. We also used two-photon polymerization patterning and a DLC coating process to successfully fabricate 200 nm wide lines, as well as 3-D rings with a diameter of 1.35 <I>μ</I>m and a height of 1.97 <I>μ</I>m, and a 3-D cone with a bottom diameter of 2.88 <I>μ</I>m and a height of 1.97 <I>μ</I>m. The wafers were successfully printed on an UV-NIL using the DLC stamps without an anti-adhesive layer. The correlation between the dimensions of the stamp's features and the corresponding imprinted features was excellent.</P>