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RISS 인기검색어
- 검색키워드
- 저자 : Jyh-Jone Lee (검색결과 3 건)
- 무료
- 기관 내 무료
- 유료
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On the Design of the Latch Mechanism for Wafer Containers in a SMIF Environment
Jyh-Jone Lee,Dar-Zen Chen,Wei-Ming Pai,Tzong-Ming Wu 대한기계학회 2006 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.20 No.12
This paper presents the design of a latch mechanism for wafer containers in a standard mechanical interface environment. For an integrated circuits fabrication factory, the standard mechanical interfaced wafer container is an effective tool to prevent wafers from particle contamination during wafer storage, transporting or transferring. The latch mechanism inside the container door is used to latch and further seal the wafer container for safety and air quality. Kinematic characteristics of the mechanism are established by analyzing the required functions of the mechanisms. Based on these characteristics, a methodology for enumerating feasible latch mechanisms is developed. New mechanisms with one degree-of-freedom and up to five links are generated. An optimum design is also identified with respect to the criteria pertinent to the application. The computer-aided simulation is also built to verify the design.
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On the Design of the Latch Mechanism for Wafer Containers in a SMIF Environment
Lee, Jyh-Jone,Chen, Dar-Zen,Pai, Wei-Ming,Wu, Tzong-Ming The Korean Society of Mechanical Engineers 2006 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.20 No.12
This paper presents, the design of a latch mechanism for wafer containers in a standard mechanical interface environment. For an integrated circuits fabrication factory, the standard mechanical interfaced wafer container is an effective tool to prevent wafers from particle contamination during wafer storage, transporting or transferring. The latch mechanism inside the container door is used to latch and further seal the wafer container for safety and air quality. Kinematic characteristics of the mechanism are established by analyzing the required functions of the mechanisms. Based on these characteristics, a methodology for enumerating feasible latch mechanisms is developed. New mechanisms with one degree-of-freedom and up to five links are generated. An optimum design is also identified with respect to the criteria pertinent to the application. The computer-aided simulation is also built to verify the design.
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On the fail-safe design of tendon-driven manipulators with redundant tendons
Jinn-Biau Sheu,Tyng Liu,Jyh-Jone Lee 대한기계학회 2012 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.26 No.6
A tendon-driven manipulator having redundant tendons may possess more flexibility in operation, such as optimizing the performance of tendons, reducing the burden of each tendon, and providing fail-safe features. The purpose of this paper is to investigate the design of tendon-driven manipulators with a fail-safe feature, that is, to synthesize a system that may still remain controllable as any of the tendons have broken down or malfunctioned. Characteristics of tendon-driven manipulators are briefly discussed. Criteria for tendon-driven manipulators with redundant tendons and fail-safe feature are then established. Subsequently, constraints for such system are derived from the structure of tendon-driven manipulator. Associated with the criteria, manipulators can remain controllable when any of the tendons fails to function. Finally, a geometric method for determining the structure is developed. Examples of two-DOF and three-DOF tendondriven manipulators are demonstrated.
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