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Kim, Hojoong,Hong, Seokjun,Jin, Yinhua,Lim, Dong Hyun,Kim, Jun-yong,Hwang, Hasub,Kim, Taesung The Electrochemical Society 2017 ECS journal of solid state science and technology Vol.6 No.8
<P>The formation of a ring-shaped residue after the chemical mechanical polishing (CMP) process of a copper (Cu) interconnect was investigated. The chemical composition of the residue was analyzed and found to be copper oxide (CuO). In the present study, the mechanism of CuO formation was investigated using interdisciplinary methods. First, the wafer surface was analyzed by electrical charge mapping and chemical composition analysis. These analyses revealed that the organic residue had not been removed in the region where the ring shaped CuO residue formed. Then, with the support of the analysis data, a hypothesis on residue formation was proposed. This hypothesis includes the nozzle configuration of the cleaning tool used in CMP. Investigations by experimental observation, as well as a simulation of chemical fluid motion, were conducted. It was shown that, owing to the configuration of the cleaning tool, there exists a specific region where the concentration of cleaning chemicals is too low for removing organic residue. Then, cross-contamination occurs without chemical fluid lubrication; in other words, there is direct solid-solid contact between the wafer and cleaning brush. Finally, the organic contamination on the wafer surface forms an electrical circuit, which results in the formation of CuO residue. (C) 2017 The Electrochemical Society.All rights reserved.</P>
Kim, Hojoong,Hong, Seokjun,Shin, Cheolmin,Jin, Yinhua,Lim, Dong Hyun,Kim, Jun-yong,Hwang, Hasub,Kim, Taesung Elsevier 2017 Wear: An international journal on the science and Vol.392 No.-
<P>The surface roughness of a chemical mechanical polishing (CMP) pad provides microscopic asperities where the actual polishing takes place. Thus, the roughness should be maintained in a proper regimen to obtain stable CMP process quality. A conditioner is a key consumable in the CMP process because it maintains the roughness of the CMP pad surface against surface glazing or flattening during polishing. Because the conditioner mechanically breaks the pad surface to maintain the roughness, previous research has expressed its ability index in terms of the pad wear rate (PWR). In the present study, we investigate the reason for PWR change of CMP pads having vigorously changing moduli with respect to temperature changes during the mass production. The pad property changed steeply in the process temperature range from 60 to 80 degrees C. The tensile strength is a key property change that leads to sudden PWR drop. We found that the shape and configuration of the diamond tip are the major parameters affecting the ability to maintain surface roughness of the pads. Thus, we suggested a proper conditioner design for tungsten (W) CMP based on the experimental data to sustain the process quality and increase the consumable lifetime. As a result, the peak surface roughness has improved from 29.4 mu m to 32.6 mu m and the consumable lifetime was also increased.</P>
Kim, Byung-Tae,Lee, Kyung Soo,Shim, Sung Shine,Choi, Joon Young,Kwon, O Jung,Kim, Hojoong,Shim, Young Mog,Kim, Jhingook,Kim, Seonwoo Radiological Society of North America 2006 Radiology Vol.241 No.2
<P>Purpose: To prospectively evaluate the sensitivity and specificity of integrated fluorine 18 fluorodeoxyglucose (FDG) positron emission tomography (PET) and computed tomography (CT) (PET/CT) for the preoperative diagnosis of mediastinal nodal metastasis in stage T1 non-small cell lung cancer (NSCLC), with surgical and histologic results as reference standards. Materials and Methods: Institutional review board approval and informed consent were obtained. From June 2003 to February 2005, 150 patients (89 men and 61 women; mean age, 59 years) with stage T1 NSCLC at stand-alone CT underwent integrated PET/CT and surgical staging. Two observers (one radiologist and one nuclear medicine physician) evaluated prospectively and in consensus the mediastinal nodes by analyzing both PET (functional) and CT (anatomic) images. Nodal stages were determined by using the American Joint Committee on Cancer staging system and surgical and histologic findings as the reference standard. Statistical evaluation of malignant lymph nodes was performed on per-nodal-station and per-person bases. Results: A total of 568 mediastinal nodal stations were evaluated. Nodes were positive for malignancy in 34 (23%) of 150 patients and 55 (10%) of 568 nodal stations. For depiction of malignant nodes, the respective sensitivity, specificity, positive predictive value, negative predictive value, and accuracy of integrated PET/CT were 42% (23 of 55), 100% (513 of 513), 100% (23 of 23), 94% (513 of 545), and 94% (536 of 568) on per-nodal-station basis and 47% (16 of 34), 100% (116 of 116), 100% (16 of 16), 87% (116 of 134), and 88% (132 of 150) on a per-patient basis. Conclusion: Integrated FDG PET/CT provides high specificity and positive predictive value of mediastinal nodal staging in stage T1 NSCLC, although the sensitivity is low. (c) RSNA, 2006.</P>
Kim, Yoon Kyung,Lee, Kyung Soo,Kim, Byung-Tae,Choi, Joon Young,Kim, Hojoong,Kwon, O Jung,Shim, Young Mog,Yi, Chin A,Kim, Ha Young,Chung, Myung Jin Wiley Subscription Services, Inc., A Wiley Company 2007 Cancer Vol.109 No.6
<B>BACKGROUND</B><P>Integrated <SUP>18</SUP>fluorine fluorodeoxyglucose (<SUP>18</SUP>F-FDG) positron emission tomography/computed tomography (PET/CT) has shown somewhat variable sensitivity and specificity for mediastinal nodal staging in granulomatous disease endemic areas. The purpose of the study was to prospectively evaluate the efficacy of PET/CT for mediastinal nodal staging in nonsmall cell lung cancer (NSCLC) patients in a tuberculosis-endemic country.</P><B>METHODS</B><P>Prospective assessment of the diagnostic efficacy of integrated PET/CT for detecting mediastinal nodal metastasis was performed in 674 patients (M:F ratio = 502:172; mean age, 61 years) with NSCLC. Patients underwent an integrated PET/CT examination and subsequent surgical nodal staging (by mediastinoscopy only in 121 patients and by thoracotomy in 553). Nodes showing greater <SUP>18</SUP>F-FDG uptake than mediastinum at PET without benign calcification or high attenuation >70 household unit (HU) at unenhanced CT were regarded as being positive for malignancy. The histologic nodal assessment results were used as reference standards.</P><B>RESULTS</B><P>Of 2477 mediastinal nodal stations evaluated in 674 patients, 275 (11%) stations in 180 (27%) patients proved to be malignant. On a per-person basis, the overall sensitivity, specificity, and accuracy of PET/CT for mediastinal nodal staging were 61% (110 of 180), 96% (473 of 494), and 86% (583 of 674), respectively. On a per-nodal station basis, they were 46% (126 of 275), 98% (2154 of 2202), and 92% (2280 of 2477).</P><B>CONCLUSIONS</B><P>Integrated PET/CT provides high specificity and reasonably high accuracy, but somewhat low sensitivity for mediastinal nodal staging of NSCLCs. The high specificity is achieved at the expense of sensitivity by interpreting calcified nodes or nodes with high attenuation at CT, even with high FDG uptake at PET, as benign in a tuberculosis-endemic region. Cancer 2007. © 2007 American Cancer Society.</P>
Kim, Hojoong,Kwon, Young Mi,Kim, Jin Seuk,Han, Joungho,Shim, Young Mog,Park, Joobae,Kim, Duk-Hwan Wiley Subscription Services, Inc., A Wiley Company 2006 Cancer Vol.107 No.5
<B>BACKGROUND.</B><P>Despite many reports about the involvement of DNA methyltransferases (DNMTs) in human cancers, including nonsmall cell lung cancer (NSCLC), the clinicopathologic significance of DNMTs in primary NSCLC remains to be elucidated.</P><B>METHODS.</B><P>The relation between the mRNA levels of DNMTs (1 and 3b) and the promoter methylation of the p16, RARβ2, H-cadherin, GSTP1, RIZ, and FHIT genes and the clinicopathologic features in 102 fresh-frozen tissues and paraffin blocks were retrospectively studied. The mRNA levels of the DNMTs were assessed via semiquantitative reverse-transcription polymerase chain reaction (RT-PCR), and the methylation status of the CpG islands were determined by methylation-specific PCR.</P><B>RESULTS.</B><P>The mRNA levels of DNMT1 and DNMT3b were elevated in 53% and 58% of 102 NSCLCs, respectively. Hypermethylation of p16, RARβ2, H-cadherin, GSTP1, RIZ, and FHIT occurred in 37%, 38%, 34%, 18%, 9%, and 31% of patients, respectively. Univariate analysis showed that elevated DNMT mRNA levels were not significantly associated with the hypermethylation of 6 genes. However, the elevated mRNA levels of DNMT1 were determined to be significantly associated with the hypermethylation of the p16 promoter (odds ratio [OR] = 2.70, 95% confidence interval [95% CI], 1.02–7.15; P = .02), after controlling for age, gender, pack-years smoked, histology, and pathologic stage. The hazard of failure in cases with elevated mRNA levels of DNMT1 was 3.51 (95% CI, 1.18–12.76; P = .02) times higher than that in those without. The elevated mRNA levels of DNMT3b were not ultimately associated with patient prognosis.</P><B>CONCLUSIONS.</B><P>Elevated mRNA expression of DNMT1 may be an independent prognostic factor in NSCLC and CpG island hypermethylation in NSCLC may be maintained by a complex interaction of several factors rather than by a simple transcriptional up-regulation of DNMT1. Cancer 2006. © 2006 American Cancer Society.</P>
Numerical Analysis of Axial-Flow Cyclone Separator for Subway Station HVAC System Pre-Filter
Myungjoon Kim,Hojoong Kim,Soon-Bark Kwon,Se-Young Kim,Jin-Kwan Kim,Chang-Hun Shin,Sung-Joon Bae,Sun-Ho Hwang,Taesung Kim 대한설비공학회 2009 International Journal Of Air-Conditioning and Refr Vol.17 No.3
In the Korean subway station, three types of pre-filters, which include auto filter, electrostatic precipitator (ESP) and auto cleaning demister, are widely used. However, these devices have some problems such as the difficulty of maintenance and high operating cost. In this study, axial-flow cyclone separator was employed as a pre-filter inside a heating, ventilation, and air conditioning (HVAC) system. 3-dimensional computational fluid dynamics (CFD) analysis was performed on a single unit axial-flow cyclone and coupled unit axial-flow cyclone. Calculated and measured pressure drop of the designed axial-flow cyclone were found be comparable to other types of pre-filters and the observed cut-off diameter was less than 10 micron. Considering lower operating and maintenance cost, axial-flow cyclone was proved to be a better solution as a pre-filter.
지하역사 공기조화기 전처리 필터용 축류형 사이클론의 수치해석 및 실험적 평가 연구
김명준(Myungjoon Kim),김호중(Hojoong Kim),김진관(Jin-Kwan Kim),김세영,권순박(Soon-Bark Kwon),김태성(Taesung Kim) 대한설비공학회 2010 대한설비공학회 학술발표대회논문집 Vol.2010 No.6
Typical Korean subway HVAC (heating, ventilation and air-conditioning) system uses three types of filter(auto suction filter, electrostatic precipitator, auto cleaning demister) as pre-filter. These kinds of filters require high maintenance and effort. To reduce such disadvantages, here we suggest axial-flow cyclone as a new type of pre-filter which has low maintenance, low effort and constant performance which is favorable. Numerical and experimental study are progressed for its evaluation.