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Cheng-Lin Huang,Chih-Huang Lai,Po-Hao Tsai,Hsing-An Huang,Jing-Cheng Lin,Chiapyng Lee 대한금속·재료학회 2013 ELECTRONIC MATERIALS LETTERS Vol.9 No.5
NbN films were prepared by radio frequency reactive magnetron sputtering and then employed as diffusion barriers between Cu and Si. The microstructure of the NbN films was an assembly of very small columnar crystallites with a cubic structure. To investigate the properties as diffusion barriers, we performed metallurgical reactions of Cu/NbN0.8/Si, Cu/Nb/Si and Cu/TaN0.7/Si for comparisons. The sheet resistance increased dramatically after annealing above 750°C for Cu/NbN0.80/Si, and above 500°C for both Cu/Nb/Si and Cu/TaN0.7/Si. The interfaces were deteriorated seriously and formation of Cu3Si was observed when the sheet resistance was significantly increased. The diffusion coefficient of Cu in NbN barrier films was estimated by using the change of resistance (ΔRs/Rs %). Compared with TaN0.7, NbN0.8 films possess larger grain size and lower Cu diffusion coefficient. Our results suggest that the NbN film can be used as a diffusion barrier for Cu metallization as compared to the well-known TaN film.
Cheng-Lin Huang,Chih-Huang Lai,Po-Hao Tsai,Yu-Lin Kuo,Jing-Cheng Lin,Chiapyng Lee 대한금속·재료학회 2014 ELECTRONIC MATERIALS LETTERS Vol.10 No.3
In this study, we investigated the thermal stability, wettability, adhesion and reliability of (Ti,Zr)Nx films used as the diffusion barrier between Cu and Si. (Ti,Zr)Nx films were prepared by DC reactive magnetron sputtering from a Ti-5 at. % Zr alloy target in N2/Ar gas mixtures. A minimum film resistivity of 59.3 μΩ cm was obtained at an N2/Ar flow ratio of 2.75, which corresponds to the near stoichiometric composition (N/(Ti,Zr) ratio ~0.95). The sheet resistance of Cu/(Ti,Zr)N0.95/Si was not significantly increased until annealing above 750°C, indicating good thermal stability. On the other hand, the adhesion energy between Cu and the (Ti,Zr)Nx film was reduced as the N/Ti ratio was increased. To obtain reliable performance on stress-induced-voiding (SIV) and electromigration (EM) tests, we proposed to use (Ti,Zr)/(Ti,Zr)Nx/(Ti,Zr) tri-layers. We suggest that the interfacial adhesion between barrier and Cu plays an important role in reliability. The proposed tri-layer structure may be a promising candidate for a barrier, as it exhibits excellent reliability without increasing resistance.
Issues in Simulating Falling Weight Deflectometer Test on Concrete Pavements
Chen-Ming Kuo,Chih-Chiang Lin,Cheng-Hao Huang,Yi-Cheng Lai 대한토목학회 2016 KSCE JOURNAL OF CIVIL ENGINEERING Vol.20 No.2
Falling Weight Deflectometer (FWD) produces pavement responses using a falling mass drop. This study investigated the features involved in the finite element modeling of FWD tests to help in the calibration of backcalculation. Falling mass, model size, subgrade damping, and boundary conditions were studied to reveal the significances of these factors on pavement responses. By modeling the falling mass in finite element models, this study has justified the idea that field-measured time history of impact force can be used as an alternative to falling mass. It is also concluded that subgrade damping, self-weight of slab, and boundary conditions are significant in modeling and interpretation of FWD finite element analysis. Finite element model with at least six times radius of relative stiffness is required to simulate dynamic responses of a continuously reinforced concrete slab.
Genotypespecific methylation of HPV in cervical intraepithelial neoplasia
Yaw-Wen Hsu,Rui-Lan Huang,Po-Hsuan Su,Yu-Chih Chen,Hui-Chen Wang,Chi-Chun Liao,Hung-Cheng Lai 대한부인종양학회 2017 Journal of Gynecologic Oncology Vol.28 No.4
Objective: Hypermethylation of human papillomavirus (HPV) and host genes has beenreported in cervical cancer. However, the degree of methylation of different HPV typesrelative to the severity of the cervical lesions remains controversial. Studies of the degree ofmethylation associated with the host gene and the HPV genome to the severity of cervicallesions are rare. We examined the association of methylation status between host genes andlate gene 1 (L1) regions of HPV16, 18, 52, and 58 in cervical brushings. Methods: Cervical brushings from 147 HPV-infected patients were obtained. The samplescomprised normal (n=28), cervical intraepithelial neoplasia (CIN) 1 (n=45), CIN2 (n=13), andCIN3/carcinoma in situ (n=61). The methylation status of HPV and host genes was measuredusing bisulfite pyrosequencing and quantitative methylation-specific polymerase chainreaction (PCR). Results: The degree of methylation of L1 in HPV16, 18, and 52 was associated with theseverity of the cervical lesion. In HPV52, C-phosphate-G (CpG) sites 6368m, 6405m, and6443m showed significantly higher methylation in lesions ≥CIN3 (p=0.005, 0.003, and0.026, respectively). Methylation of most HPV types except HPV52 (r<−0.1) was positivelycorrelated with the degree of methylation of host genes including PAX1 and SOX1 (0.4≤r≤0.7). Combining HPV methylation with PAX1 methylation improved the clustering for ≥CIN2. Conclusion: Our study showed that the degree of L1 methylation of HPV16, 18, and 52but not 58 is associated with the severity of cervical lesions. The association betweenHPV methylation and host gene methylation suggests different responses of host cellularepigenetic machinery to different HPV genotypes.