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A Piezoelectric-driven Single-nozzle Dispenser for Liquid Droplet Jetting
함영복,서우석,오성진,박중호,윤소남 한국물리학회 2010 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.57 No.41
This paper presents a piezoelectric-driven single-nozzle dispenser head using a multilayered piezoelectric actuator for liquid droplet jetting in the fields of semi-conductor packaging and so on. The design, fabrication, and characteristics of the piezoelectric-driven single-nozzle dispenser head are summarized. The proposed single-nozzle dispenser head consists of three major parts: a multilayered piezoelectric actuator, a piston embedded diaphragm, and a micro nozzle with a pressurized dispensing chamber. The overall size of the fabricated single-nozzle dispenser head is 25 mm × 25 mm × 46 mm. The piston embedded diaphragm, which is made of stainless steel, has a diameter of 17 mm and a thickness of 100 µm. The micro-nozzle specifications are a 100 µm and a 200 µm diameter and a 500 µm depth, and the dispensing chamber height between the diaphragm and the nozzle cover is 300 µm. The dispensing experiments were performed with deionized water as the working fluid. The dispensing characteristics, such as the liquid droplet volume rate and the visualization of the droplet, were experimentally investigated as functions of the applied voltage and the driving frequency.
함영복,차재곤,김대명,공태우,윤소남,안국영,권병수 사단법인 유공압건설기계학회 2010 드라이브·컨트롤 Vol.7 No.1
This paper presents the experimental results of the radial piston type oil pump with new mechanism for a metal diaphragm hydrogen compressor. Generally, metal diaphragm type hydrogen compressor systems are operated by oil hydraulic power. In this system an oil compensating pump has been demanded to compensate for a leakage oil head chamber. The metal diaphragm type hydrogen compressor consists of an oil compensating pump, commonly used hydraulic piston pump and driven by main crank shaft. The radial piston type oil compensating pump with new rolling contacted piston mechanism is developed and experimented. The developed piston element of the radial piston pump consists of piston, steel ball, return spring, two check valves, eccentric cam and ball racer. In this study, designed 4 type pistons as and orifice hole. Operating characteristics and pressure ripple characteristics are tested under no load to 60bar loaded with every 20bar increasing step and pressure ripple and flow rate are experimentally investigated. 수소압축기는 무급유 방식의 왕복동식과 무윤활 방식의 메탈 다이아프램 방식으로 양분되며, 각 방식에 따라 수소의 순도와 충진압에서 일장일단의 특성을 나타낸다. 메탈 다이아프램 수소압축기는 유압구동부의 누설유량과 흡입 시 발생하는 캐비테이션 방지를 위한 과급유 상태를 유지할 수 있도록, 피스톤 챔버와 오일 헤드 챔버에 오일을 보충하게 된다. 이러한 목적으로 오일보충용 펌프는 압축기의 크랭크케이스 내부의 메인 크랭크샤프트에 연결하여 구동하게 된다. 본 연구에서는 메탈 다이아프램 수소압축기의 오일 보충용 펌프로 개발된 레이디얼 피스톤 펌프의 피스톤을 스틸 볼이 볼 레이스 위를 구름 접촉하도록 구성하고 볼이 설치된 피스톤 끝면 윤활용 오리피스를 설치하고 서로 다른 오리피스 직경에 대해 실험적으로 비교 평가하고 개발된 펌핑 메카니즘의 구조적 타당성을 검토해 본다.
Development of a Piezoelectric Pump for a Highly-precise Constant Flow Rate
함영복,서우석,오성진,박중호,윤소남,안국영 한국물리학회 2010 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.57 No.41
Recently, piezoelectric-driven small and micro-sized pumps have been developed for applications in microfluidics, bio-chemistry diagnostics, fuel cell systems, drug delivery, and high-power electronics cooling, etc. This paper describes a piezoelectric pump using a multilayered piezoelectric actuator for highly-precise constant flow rate. The design, fabrication, and basic characteristics of the developed piezoelectric pump are summarized. The proposed pump consists of a pump housing, a multilayered piezoelectric actuator, a valve sheet and a single check valve for an inlet port. The overall dimensions of the fabricated piezoelectric pump are 25 mm × 25 mm × 53 mm. Pumping characteristics were experimentally investigated. The fabricated pump achieved a no-load flow rate of 110 ml/min and a maximum output power of 130 mW at an applied voltage of 150 Vpp and a driving frequency of 700 Hz.