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비구면 유리 렌즈 성형용 초경합금(WC) 표면에 이온 빔 보조 마그네트론 스퍼터가 적용된 이리듐-레늄 코팅 박막 특성에 관한 연구
정경서(K. S. Jung),김미선(M. S. Kim),이상원(S. W. Lee),최상경(S. K. Choi),이수경(S. K. Lee) 한국소성가공학회 2012 한국소성가공학회 학술대회 논문집 Vol.2012 No.10
Iridium-Rhenium(Ir-Re) thin films were deposited onto the tungsten carbide(WC) molding core by ion beam assist sputtering system. The Ir-Re films were prepared by compound-target sputtering with iridium, rhenium and chromium as the sources. Argon were inlet into the chamber to be the plasma and reactive gases. The Ir-Re thin films were prepared with targets having atomic percent of 7:3 and the Ir-Re thin films were formed with about 200 ㎚ thickness. The Ir-Re thin films on tungsten carbide molding core were analyzed by scanning electron microscope(SEM) and surface roughness. Also, adhesion strength and coefficient friction of Ir-Re thin film were examined. The Ir-Re coating technique has been intensive efforts in the field of coating process because the coating technique and process have been their feature, like hardness, high elasticity, abrasion resistance and mechanical stability and also have been applied widely the industrial and biomedical areas. In this report, tungsten carbide(WC) molding core was manufactures using high performance precision machining and the efforts of Ir-Re coating on the surface roughness.