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TMAH/IPA/pyrazine 용액에서의 전기화학적 식각정지특성
정귀상,박진성 한국센서학회 1998 센서학회지 Vol.7 No.6
This paper describes electrochemical etch-stop characteristics in TMAH/IPA/pyrazine solution. I-V curves of n- and p-type Si in TMAH/IPA/pyrazine solution were obtained. OCP(Open Circuit Potential) and PP (Passivation Potential) of p-type Si were -l.2 V and 0.1 V, and of n-type Si were -1.3 V and -0.2 V, respectively. Both n- and p-type Si, etching rates were abruptly decreased at potentials anodic to the PP. The etch-stop characteristics in TMAH/TPA/pyrazine solution were observed. Since accurate etching stop occurs at pn junction, Si diaphragms having thickness of epi-layer were fabricated. Etching rate is highest at optimum etching condition, TMAH 25wt.%/IPA 17vo1.%/pyrazine 0.1g/100ml, thus the elapsed time of etch-stop was reduced.
노상수,김동현,정귀상,김형표,김광호 한국센서학회 2002 센서학회지 Vol.11 No.6
본 논문에서는 백금박막 온도센서의 0℃, 100Ω 세팅을 위해 355nm 파장을 갖는 자외선 레이져를 이용하였다. 국제적으로 온도센서의 A-class 기준오차는 0℃에서 ±0.06Ω 이다. 실제적으로 이 값은 0.15℃ 이하에 해당하는 오차로 저항체 제작시 고정밀 가공 기술을 필요로 한다. 가공에 이용된 355nm DYP(Diode-Pumped YAG) 레이져는 power : 37mW, rep, rate 주파수; 200Hz 그리고 bite size : 7.5㎛에서 1~l.5㎛ 두께의 백금박막을 가장 안전하게 가공할 수 있었으며 가공선폭은 10㎛ 안팍임을 확인하였다. 그리고 사진식각 공정기술을 이용하여 제작된 2″x 2″기판내의 96개(4 by 24) 저항체는 상온 25℃에서 79~90Ω : 42.7%, 91~102Ω : 57.3%의비율로 각각 제작되어졌다. 109.73Ω를 목표값으로 25℃에서 자외선 레이저를 이용하여 가공한 결과 82.3%가 가공오차가 ±0.03Ω이하에 들어왔으며 나머지 17.7%도 국제규격 A-Class내인 ±0.06Ω내에 포함되었다. In this paper, we used U.V.(wavelength, 355nm) laser for adjusting Pt thin films temperature sensor to 100Ω at 0℃. Internationally, A-class tolerance of temperature sensor is ±0.06Ω at 0℃. This is under value of 0.15℃, actually, so high-fine trimming technology is essential to this process. The width of trimmed lines was about 10㎛ and the best trimming of Pt thin films of 1~1.5㎛ was carried out with power : 35mW, rep. rate frequency : 200Hz and bite size : 1.5㎛ . And using photolithography process, 96 resistors were fabricated in 2″x 2″substrate as the proportion of 79~90Ωand 91~102Ω is 42.7% and 57.3%, respectively. As result of trimming resistors to the target value of 109.73Ω at 25℃, 82.3% of resistors had the tolerance within ±0.03Ω and the others(17.7%) were within ±0.06Ω of A-class tolerance.
공중합체 LB막의 누적상태 평가 및 유기 가스 반응 특성
신훈규,최용성,이범종,정귀상,장정수,권영수 경북대학교 센서기술연구소 1995 센서技術學術大會論文集 Vol.6 No.1
In this paper, the monolayers of the polymers which were polyion-complexed with PAA at the air-water interface can be transferred onto solid substrates such as porous fluorocarbon membranes filter and quartz crystal microbalance. The properties of the monolayers and the LB films have been discussed by π-A isothemis, FT-IR, DSC, deposition ratio, QCM, SEM and UV absorbance. In addition, it was attempted to investigate response characteristics of polymer LB films to the organic gas by the use of QCM.