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Powder Blasting을 이용한 Fused Silica Glass의 미세채널 가공
장호수,윤대진,전두성,이정원,박동삼 한국공작기계학회 2007 한국공작기계학회 추계학술대회논문집 Vol.2007 No.-
The old technique of sandblasting which has been used for paint of scale removing, de burring and glass decorating has recently been developed into a powder blasting technique for brittle materials, capable of producing micro structures larger than 100㎛. Recently, this technique is applied to fabrication of the microchannel for fuel cell processor and lab-on-a chip. This paper describes the performance of powder blasting in micromachining of microchannel of fused silica glass and the effect of blasting conditions such as the number of nozzle scanning and the size of abrasive on the erosion depth.
파우더 블라스팅을 이용한 Quartz glass의 가공성 평가
장호수,윤대진,김선아,박동삼 한국공작기계학회 2008 한국공작기계학회 춘계학술대회논문집 Vol.2008 No.-
Micro fluid channels are machined on quartz glass via powder blasting, and the machining characteristics of the channels are experimentally evaluated. The powder blasting process parameters affecting the machined results are injection pressure, abrasive particle size and density, stand-off distance, number of nozzle scanning, and shape/size of the required patterns. In this study, the influence of the number of nozzle scanning, abrasive particle size, and blasting pressure on the formation of micro channels is investigated. Machined shapes and surface roughness are measured, and the results are discussed.