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XPS와 SEM을 이용한 폴리실리콘 표면에 형성된 잔류막에 대한 연구
김태형(T. H. Kim),이종완(J. W. Lee),최상준(S. J. Choi),이창원(C. W. Lee) 한국진공학회(ASCT) 1998 Applied Science and Convergence Technology Vol.7 No.3
HBr/Cl₂/He-O₂반응 기체를 이용한 반응성 이온 식각후, 폴리실리콘 표면에 형성된 잔류막을 x-선 광전자 분광법(x-ray photoelectron spectroscopy, XFS)과 전자 현미경(scanning electron microscopy, SEM)을 이용하여 관찰하였다. 그 결과 잔류물은 패턴된 폴리실리콘의 맨 윗부분에 잔존하고 있었으며, 화학 결합 상태는 실리콘 산화물임이 밝혀졌다. 잔류물인 실리콘 산화물의 형성 메카니즘을 규명하기 위하여 원래의 혼합 기체 성분중 한가지씩의 반응 기체를 제외시켜 가면서 실험하였다. 비록 플라즈마 성질이 다를지라도, 잔류물은 산소의 존재하에서 잘 형성됨을 알 수 있었는데, 이는 휘발성이 낮은 실리콘-할로겐 화합물이 산소에 의해 산화됨으로써 형성되는 것으로 이해하게 되었다. 또한 반응성 이온 식각후 형성된 잔류층은 소자의 전기적 특성과 후처리 공정에 영향을 미치는 것으로 알려져 있어서, 이를 제거하기 위해 습식과 건식 후처리 공정을 도입하여 비교하였다. 그 결과 건식 공정의 경우 반응 기체에 의해 새로운 잔류물이 형성됨을 XPS를 통하여 관찰하였다. 따라서 잔류물을 제거하고 깨끗한 표면을 얻기 위해서는 습식 공정이 더 적합함을 알았다. The plasma etching of polysilicon was performed with the HBr/Cl₂/He-O₂ gas mixture. The residual layers after photoresist strip were investigated using x-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). The etch residue was identified as silicon oxide deposited on the top of the patterned polysilicon. In order to clarify the formation mechanism of the etch residue, the effects of various gas mixtures such as Cl₂/He-O₂, HBr/He-O₂ and HBr/Cl₂ were investigated. We found that the etch residue is well formed in the presence of oxygen, suggesting that the etch residue is caused by the reaction of oxygen and non-volatile silicon halide compounds. Wet cleaning and dry etch cleaning processes were applied to remove the polysilicon etch residue, which can affect the electrical characteristics and further device processes. XPS results show that the wet cleaning is suitable for the removal of the etch residue.
오상한(S.H. Oh),이창원(C.W.Lee),원성필(S.P.Won) 한국자동차공학회 1995 한국자동차공학회 춘 추계 학술대회 논문집 Vol.1995 No.6_1
The computer simulation program that calculates the transient heat load transferred to a passenger vehicle has been developed Method for modelling mathematically various kinds of the heat load was presented and the derived equations were solved numerically. To find out the accuracy of the simulation program, the correlation of experimental and analytical results was demonstrated. By using this program, the typical characteristics about temperature distribution and instantaneous or total heat load for each part of the vehicle were predicted and analyzed, according to the change of vehicle body color, material of glass, air-conditioning capacity, driving direction, and speed Under a steady-state condition, the ratios of the heat load resulting from vehicle body, glass, and interior part, were 29%, 30%, and 41%, respectively.<br/>
오상한,이창원,원성필,Oh, S.H.,Lee, C.W.,Won, S.P. 대한설비공학회 1997 설비공학 논문집 Vol.9 No.3
The fundamental theory and technical approach to aid design and development of an automotive air-conditioning system are presented. The evaluation methods for transient cooling load transferred to a passenger compartment and simulation of automotive air-conditioning components are outlined. The structure of the computer program, the experiemntal correlations, and the simulation results are also included. The total cooling load of the white-colored car is reduced upto 5% for that of the black-colored car when the car is running. Using the infrared reflectance glass, we can also obtain 5% reduction of the total cooling load for the common glass.