http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
마이크로웨이브 플라즈마 화학기상증착법에 의한 탄소나노튜브의 성장특성
최성헌,이재형,Choi Sung-Hun,Lee Jae-Hyeoung 한국전기전자재료학회 2006 전기전자재료학회논문지 Vol.19 No.6
Carbon nanotubes (CNTs) were grown with a microwave plasma enhanced chemical vapor deposition (MPECVD) method, which has been regarded as one of the most promising candidates for the synthesis of CNTs due to the vertical alignment, the low temperature and the large area growth. MPECVD used methane ($CH_4$) and hydrogen ($H_2$) gas for the growth of CNTs. 10 nm thick Ni catalytic layer were deposited on the Ti coated Si substrate by RF magnetron sputtering method. In this work, the pretreatment was that the Ni catalytic layer in different microwave power (600, 700, and 800 W). After that, CNTs deposited on different pressures (8, 12, 16, and 24 Torr) and grown same microwave power (800 W). SEM (Scanning electron microscopy) images showed Ni catalytic layer diameter and density variations were dependent with their pretreatment conditions. Raman spectroscopy of CNTs shows that $I_D/I_G$ ratios and G-peak positions vary with pretreatment conditions.
탄소나노튜브의 니켈 촉매층 수소 플라즈마 전처리조건에 따른 성장특성
이재형,최성헌 국립7개대학공동논문집간행위원회 2005 공업기술연구 Vol.5 No.-
We have grown carbon nanotubes (CNTs) with a mocrowave plasma chemical vapor deposition (MPECVD) method, which has been regard as one of the most promising candidates for the synthesis of CNTs due to the vertical alignment, the low temperature and the large area growth. We use methane (CH₄) and hydrogen (H₂) gases for the growth of CNTs. 10-nm-thick Ni catalytic layer were deposited on the Ti coated Si substrate by RF magnetron sputtering method. In this work, we repert the effects of pretreatment microwave power on the growth of CNTs. We have pretreated the Ni catalytic layer in different microwave power (600, 700, and 800 W) and, after that, grown asme microwave power (800 W). SEM (Scanning Electron Microscopy) images show the diameter and density of Ni catalytic layer dependent on their pretreatment conditions. Raman spectroscopy of CNTs shows that ID/IG ratios and G-peak positions vary with pretreatment conditions.