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산화갈륨 희생층을 이용한 AlGaN/GaN-on-Si HFET의 특성 개선 연구
이재길(Jae-Gil Lee),차호영(Ho-Young Cha) 대한전자공학회 2014 전자공학회논문지 Vol.51 No.2
본 논문에서는 AlGaN/GaN HFET의 누설전류 특성을 개선하고자 산화갈륨 희생층 공정을 이용한 새로운 패시베이션 공정을 제안하였다. 오믹 전극 형성시 고온 열처리 과정으로 인해 갈륨의 표면 손상이 불가피하다. 표면 손상을 방지하기 위해 보편적으로 선표면처리 공정을 사용하기도 하지만 이러한 방법만으로는 표면 손상을 완전히 없애기 어렵다. 본 연구에서 새롭게 제안된 산화갈륨 희생층을 이용한 공정 방법은 고온 열처리 후 손상된 표면에 O2 플라즈마 처리를 통해 산화갈륨층을 형성한 뒤, 염화수소를 이용하여 산화갈륨층을 식각한다. 우수한 상태의 표면 상태를 얻을 수 있었으며, 누설전류의 확연한 감소로 subthreshold slope이 개선되었을 뿐만 아니라 최대 드레인 전류 특성도 594 mA/mm에서 634 mA/mm로 증가하였다. 질화갈륨 희생층 공정의 효과를 분석하기 위해 X-선 광전자 분광법을 이용하여 질화갈륨의 표면 변화에 대해 살펴보았다. We have developed a novel passivation process employing a sacrificial gallium oxide process in order to recover the surface damage in AlGaN/GaN HFETs. Even with a conventional prepassivation process, surface damage during high temperature ohmic annealing cannot be avoided completely. Therefore, it is necessary to recover the damaged surface to avoid the characteristic degradation. In this work, a sacrificial gallium oxide process has been proposed in which the damaged surface after ohmic annealing was oxidized by oxygen plasma treatment and thereafter etched back using HCl. As a result, the leakage current was dramatically reduced and thus the subthreshold slope was significantly improved. In addition, the maximum drain current level was increased from 594 to 634 mA/mm. To verify the effects, the surface conditions were carefully investigated using X-ray photoelectron spectroscopy.
IPA(중요도-성취도)를 활용한 대전지역 MICE산업 경쟁력 제고방안 연구 - MICE산업 종사자의 전문화 수준을 중심으로 -
이재길 ( Lee Jae-gil ),정웅용 ( Chung Ung-young ),한학진 ( Han Hag-chin ) 한국호텔리조트학회 2021 호텔리조트연구 Vol.20 No.6
The purpose of this study is to find the ways to enhance the competitiveness of the MICE industry in Daejeon by applying the IPA (Importance-Performance Analysis) method to MICE industry workers. Competitiveness is an integrated concept, not a fragment, and research on a wide variety of items is needed to enhance competitiveness. This study was intended to try practical supplier-oriented research as previous studies mainly focused on user-centered optional attributes. In recent years, the role of agencies (PCOs, PEOs) in the MICE industry has become important. This is the result of the increasing importance of MICE industry workers who have the ability to act on behalf of professional tasks due to the nature of the MICE industry. This study attempted to study the actual employees of the MICE industry among the stakeholders of the MICE industry, and furthermore, it was intended to identify the current time of Daejeon as an industrial city of MICE.