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티타늄 이소프로폭사이드를 이용한 졸-겔법에 의한 TiN 코팅 cBN 분말 합성
이윤성,김선욱,이영진,이지선,신동욱,김세훈,김진호,Lee, Youn Seong,Kim, Sun Woog,Lee, Young Jin,Lee, Ji Sun,Shin, Dongwook,Kim, Sae-Hoon,Kim, Jin Ho 한국전기전자재료학회 2020 전기전자재료학회논문지 Vol.33 No.5
In this study, TiN-coated cBN (cubic-structure boron nitride) powders were successfully synthesized by a sol-gel method using titanium (IV) isopropoxide (TTIP) and by controlling the heat treatment conditions. After the sol-gel process, amorphous nano-sized TiO<sub>x</sub> was uniformly coated on the surface of cBN powder particles. The obtained TiO<sub>x</sub>-coated cBN powders were heated at 1,000~1,300℃ for 1 or 6 h in a flow of 95%N<sub>2</sub>-5%H<sub>2</sub> mixed gas. With increasing temperature, the chemical composition of the TiO<sub>x</sub> coating layer changed in the order of TiO<sub>2</sub>→Ti<sub>6</sub>O<sub>11</sub>→Ti<sub>4</sub>O<sub>7</sub>→TiN due to reduction of the Ti ions. The TiN coating layer was observable in the samples heated at 1,200℃ and appeared as the main phase in the sample heated at 1,300℃. The resulting thickness of the TiN coating layer of the sample heated at 1,300℃ was approximately 45~50 nm.