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탄소나노튜브-금속산화물 나노와이어의 3차원 혼성 나노구조 형성 및 응용
옥종걸(Jong G. Ok),A. John Hart,L. Jay Guo 대한기계학회 2014 대한기계학회 춘추학술대회 Vol.2014 No.11
We present the assembly and application of three-dimensional (3D) hybrid nanoarchitectures comprising carbon nanotubes (CNTs) and metal oxide (MOx) nanowires such as zinc oxide and vanadium oxide. The MOx nanowires are hierarchically assembled onto the surface of aligned or textured CNT constructs via the step-wise chemical vapor deposition (CVD) process at the temperature CNTs are free from oxidative degradation. Since the conformal highdensity MOx nanowires can be directly connected to highly conducting CNT framework over large interfacial area, the electrical response originating from functional MOx upon external stimuli can be rapidly and efficiently collected through the CNT framework, leading to many applications ranging from fast-responsive sensors to energy converters.
산화아연 나노구조의 탄소나노튜브와의 혼성구조 형성 특성 연구
옥종걸(Jong G. Ok) 대한기계학회 2015 大韓機械學會論文集B Vol.39 No.6
본 논문에서는 순차적 화학기상증착법에 기반하여 다양한 구조적 특성을 갖는 산화아연 나노구조체를 탄소나노튜브 상에 3 차원 혼성구조로 형성하는 공정을 개발하고 그 형성 메커니즘을 논한다. 이어서 나노와이어, 나노로드, 나노플레이트, 다결정 나노박막 등 다양한 형상의 산화아연 나노구조를 온도, 압력, 개스유량 등 주요 파라미터들의 조절을 통해 형성할 수 있음을 보이며, 이의 형성 원리에 대해 기본적인 형성 메커니즘과 연계하여 고찰한다. 본 연구 결과를 통해, 압전 및 광전 에너지변환 특성 등 풍부한 기능성을 보유하되 다소 높은 전기저항을 갖는 산화아연 나노구조체를 다양한 포맷으로 양전도성의 탄소나노튜브와 혼성화 함으로써, 각각의 포맷 별로 특화된 보다 폭넓은 응용 분야로의 활용을 구현해 나갈 수 있을 것이다. We study the structural and functional characteristics of zinc oxide (ZnO) nanostructures that are grown on carbon nanotube (CNT) constructs via step-wise chemical vapor deposition (CVD). First, we optimize the CVD process to directly grow ZnO nanostructures on CNTs by controlling the growth temperature below 600 °C, where CNTs can be sustained in a ZnO-growing oxidative atmosphere. We then investigate how the morphology and areal density of ZnO nanostructures evolve depending on process parameters, such as pressure, temperature, and gas feeding composition, while focusing on the effect of underlying CNT topology on ZnO nucleation and growth. Because various types of ZnO nanostructures, including nanowires, nanorods, nanoplates, and polycrystalline nanocrystals, can be conformally formed on highly conductive CNT platforms, this electrically addressable three-dimensional hybrid nanoarchitecture may better meet a wide range of nanoelectronic application?specific needs.
롤압연, 압출, 단조 등 전통 기계가공법의 모사 응용을 통한 다양한 나노패턴의 대면적 연속생산 기술 구현
옥종걸(Jong G. Ok),곽문규(Moon Kyu Kwak),L. Jay Guo 한국생산제조학회 2015 한국생산제조학회지 Vol.24 No.2
We present a series of simple but novel nanopatterning methodologies inspired by traditional mechanical machining processes involving rolling, pullout, and forging. First, we introduce roll-to-roll nanopatterning, which adapts conventional rolling for continuous nanopatterning. Then, nano-inscribing and nano-channel lithography are demonstrated, whereby seamless nanogratings can be continuously pulled out, as in a pullout process. Finally, we discuss vibrational indentation micro- and nanopatterning. Similarly to the forging/indentation process, this technique employs high-frequency vertical vibration to indent periodic micro/nanogratings onto a horizontally fed substrate. We discuss the basic principles of each process, along with its advantages, disadvantages, and potential applications. Adopting mature and reliable traditional technologies for small-scale machining may allow continuous nanopatterning techniques to cope with scalable and low-cost nanomanufacturing in a more productive and trustworthy way.
마이크로나노그레이팅 경질 몰드 모서리의 연속적 각인 소성가공 기반 유연 마이크로나노패턴의 고속 연속 제작 공정시스템 개발
이승조(Seungjo Lee),오동교(Dong Kyo Oh),박재규(Jaekyu Park),김정대(Jeong Dae Kim),이재혁(Jae Hyuk Lee),옥종걸(Jong G. Ok) 한국생산제조학회 2016 한국생산제조학회지 Vol.25 No.5
In this study, we develop a novel high-throughput micronanopatterning system that can implement continuous mechanical pattern inscribing on flexible substrates using a rigid grating mold edge. We perform a conceptual design of the process principle, specific modeling, and buildup of a real system prototype. This research also carefully addresses several important issues related to processing and controlling, including precision motion, alignment, heating, and sensing to enable a successful micronanopatterning in a continuous and high-speed fashion. Various micronanopatterns with the desired profiles can be created by tuning the mold shape, temperature, force, and substrate material toward many potential applications involving electronics, photonics, displays, light sources, and sensors, which typically require a large-area and flexible configurations.
기계적 소성 각인 기반 연속 고속 나노패터닝 시스템 개발
이승조(Seungjo Lee),오동교(Dong Kyo Oh),박재규(Jaekyu Park),김정대(Jeong Dae Kim),이재혁(Jae Hyuk Lee),옥종걸(Jong G. Ok) 대한기계학회 2016 대한기계학회 춘추학술대회 Vol.2016 No.12
We develop a high-throughput nanopatterning system which enables continuous mechanical nanopattern inscribing on flexible substrates by using a rigid grating mold edge. We perform the conceptual design of process principle, specific modeling, and buildup of a real prototype of the system. Several important issues related to processing and controlling, covering precision motion, alignment, heating, and sensing, are carefully addressed to achieve successful nanopatterning in a continuous and high-speed fashion. By tuning the mold shape, temperature, force, and substrate material, various functional nanopatterns can be created with the desired profiles towards many potential applications involving electronics, photonics, displays, light sources, and sensors, particularly requiring large-area and flexible configurations.
단순직선 모서리형 툴의 수평 이송 기판 상 고주기 진동압입 기반 연속적 나노패턴 생산 시스템 개발
김지엽(Jiyeop Kim),이윤규(Youn Kyu Lee),지강민(Kang Min Jee),이승조(Seungjo Lee),문승규(Seung Kyu Moon),옥종걸(Jong G. Ok) 한국생산제조학회 2018 한국생산제조학회지 Vol.27 No.3
We developed a continuous nanopattern manufacturing system that realizes a high-frequency vibrational indentation of a simple flat-edge rigid tool onto a horizontal-feeding polymer substrate with computer-based control. We first designed a process principle and its implementation modules, and subsequently constructed a system prototype. By controlling the tool vibration frequency and indenting force as well as the substrate feeding speed and stroke direction, we can create diverse nanopatterns with various periods and shapes including periodtunable nanogratings and multidimensional nanostructures. Such manufactured nanopatterns may be utilized in many potential applications involving precision machinery components, displays and light sources, sensors and actuators, and flexible electronics and photonics, all of which require tunable periods and shapes.