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Silicide-Enhanced Rapid Thermal Annealing을 이용한 다결정 Si 박막의 제조 및 다결정 Si 박막 트랜지스터에의 응용
김존수,문선홍,양용호,강승모,안병태,Kim, Jone Soo,Moon, Sun Hong,Yang, Yong Ho,Kang, Sung Mo,Ahn, Byung Tae 한국재료학회 2014 한국재료학회지 Vol.24 No.9
Amorphous (a-Si) films were epitaxially crystallized on a very thin large-grained poly-Si seed layer by a silicide-enhanced rapid thermal annealing (SERTA) process. The poly-Si seed layer contained a small amount of nickel silicide which can enhance crystallization of the upper layer of the a-Si film at lower temperature. A 5-nm thick poly-Si seed layer was then prepared by the crystallization of an a-Si film using the vapor-induced crystallization process in a $NiCl_2$ environment. After removing surface oxide on the seed layer, a 45-nm thick a-Si film was deposited on the poly-Si seed layer by hot-wire chemical vapor deposition at $200^{\circ}C$. The epitaxial crystallization of the top a-Si layer was performed by the rapid thermal annealing (RTA) process at $730^{\circ}C$ for 5 min in Ar as an ambient atmosphere. Considering the needle-like grains as well as the crystallization temperature of the top layer as produced by the SERTA process, it was thought that the top a-Si layer was epitaxially crystallized with the help of $NiSi_2$ precipitates that originated from the poly-Si seed layer. The crystallinity of the SERTA processed poly-Si thin films was better than the other crystallization process, due to the high-temperature RTA process. The Ni concentration in the poly-Si film fabricated by the SERTA process was reduced to $1{\times}10^{18}cm^{-3}$. The maximum field-effect mobility and substrate swing of the p-channel poly-Si thin-film transistors (TFTs) using the poly-Si film prepared by the SERTA process were $85cm^2/V{\cdot}s$ and 1.23 V/decade at $V_{ds}=-3V$, respectively. The off current was little increased under reverse bias from $1.0{\times}10^{-11}$ A. Our results showed that the SERTA process is a promising technology for high quality poly-Si film, which enables the fabrication of high mobility TFTs. In addition, it is expected that poly-Si TFTs with low leakage current can be fabricated with more precise experiments.
플라즈마 산화방법을 이용한 질소가 첨가된 실리콘 산화막의 제조와 산화막 내의 질소가 박막트랜지스터의 특성에 미치는 영향
김보현,이승렬,안경민,강승모,양용호,안병태,Kim, Bo-Hyun,Lee, Seung-Ryul,Ahn, Kyung-Min,Kang, Seung-Mo,Yang, Yong-Ho,Ahn, Byung-Tae 한국재료학회 2009 한국재료학회지 Vol.19 No.1
Silicon dioxide as gate dielectrics was grown at $400^{\circ}C$ on a polycrystalline Si substrate by inductively coupled plasma oxidation using a mixture of $O_2$ and $N_2O$ to improve the performance of polycrystalline Si thin film transistors. In conventional high-temperature $N_2O$ annealing, nitrogen can be supplied to the $Si/SiO_2$ interface because a NO molecule can diffuse through the oxide. However, it was found that nitrogen cannot be supplied to the Si/$SiO_2$ interface by plasma oxidation as the $N_2O$ molecule is broken in the plasma and because a dense Si-N bond is formed at the $SiO_2$ surface, preventing further diffusion of nitrogen into the oxide. Nitrogen was added to the $Si/SiO_2$ interface by the plasma oxidation of mixtures of $O_2/N_2O$ gas, leading to an enhancement of the field effect mobility of polycrystalline Si TFTs due to the reduction in the number of trap densities at the interface and at the Si grain boundaries due to nitrogen passivation.
정현파 모델 부호화기를 위한 MP(Matching Pursuit) 알고리즘과 파라미터 양자화기
안영욱,정규혁,김종학,양용호,이인성,Ahn Yeong-Uk,Jeong Gyu-Hyeok,Kim Jong-Hak,Yang Yong-Ho,Lee In-Sung 한국음향학회 2005 韓國音響學會誌 Vol.24 No.7
본 논문에서는 고대역 (4kHz-8kHz)의 주기적 성분이 강하게 나타나는 신호에 대해서 MP (Matching Pursuit) 알고리즘을 이용한 부호화 방법을 제안한다. 또한 분석된 스펙트럼 크기 파라미터와 위상 파라미터의 효율적인 양자화 방법을 제안한다. MP 알고리즘은 오류 상쇄 원리와 정현파 모델에 바탕을 두고 있기 때문에 정확한 피치 주기 예측이 필요하다. 고대역의 정확한 피치 주기 예측을 위해 저대역 (0kHz-4kHz) 신호에서 검출한 피치 주기를 이용함으로써 부호화와 비트할당의 효율을 높일 수 있다. 스펙트럼 크기 계수의 양자화를 위해 계수들에 대해 고정 차원 이산코사인 변환 (MDCT : Modified Discrete Cosine Transform) 및 다단계 (multi-stage) 구조를 결합시킨 양자화 기법을 사용하였고, 위상 값들은 스펙트럼 크기에 따른 가중치 필터와 위상의 $2{\pi}$ 순환 특성을 이용하여 양자화하였다. 또한 제안한 양자화 기법과 부호화 방법을 음성 분석-합성 (analysis-by-synthesis) 시스템에 적용하여, 목적 신호와의 비교를 통해 검증한다. 향후 대역 분할을 기본 구조로 하는 계층 구조의 광대역 음성부호화기에의 적용 가능성을 제시한다. In this paper. we propose a coding method using a matching pursuit algorithm in a strongly periodic highband signal. Also. we propose an efficient quantizer for the estimated parameters : spectral magnitude and phase. Based on the error concealment principle and sinusoidal model. the MP algorithm requires the high-precision pitch period estimation. To estimate more accurate pitch period. the refined pitch obtained from lowband speech is used. which increases the efficiency of bit allocation. The spectral magnitude parameters are quantized by the method which is combined with MDCT (Modified Discrete Cosine Transform) and multi-stage structure. The spectral phase quantizer uses the $2{\pi}$ modular characteristic of phases and the weighted function by spectral magnitudes. To evaluate the efficiency of the proposed method. we applied it to analysis-by-synthesis system. Furthermore we suggest the possibillity of scalable wideband speech codecs based on band-split structure.
위상 변환 인자가 적용된 음성의 중첩합산 정현파 합성 방법
박종배(Jong-Bae Park),김종학(Jong-Hark Kim),김규진(Kyu-Jin Kim),양용호(Yang Yong Ho),이인성(In-Sung Lee) 대한전자공학회 2007 대한전자공학회 학술대회 Vol.2007 No.7
In this paper, we propose a new method for overlap and add synthesis using phase shaping factor in a sinusoidal synthesis method of speech signal, which improves continuity and SNR(Signal Noise Ratio} efficiency of synthesized speech.
ZigBee와 SIP를 이용한 실시간 생체 신호 모니터링 시스템의 설계 및 구현
김영준(Young Joon Kim),정인교(In Gyo Jung),양용호(Yong Ho Yang),김보남(Bo Nam Kim),이인성(In Sung Lee) 대한전자공학회 2008 電子工學會論文誌-CI (Computer and Information) Vol.45 No.1
본 논문에서는 ZigBee와 SIP를 이용하여 사용자의 위치와 시간에 상관없이 사용자의 상태를 의료진과 사용자가 쉽게 확인할 수 있도록 실시간으로 생체 신호를 전송하고 모니터링하는 시스템을 제안하였다. 센서와 사용자 무선 단말기 사이의 데이터 전송을 구조가 간단하고 낮은 원가의 장점을 가지는 ZigBee로 구현하였으며, ZigBee를 이용한 센서 네트워크 구성 시 기존의 Ad-hoc 라우팅 프로토콜을 사용하지 않고 트리 기반의 네트워크를 구성함으로써 에너지 소모량을 감소시켰다. 또한 WLAN 기반의 사용자 무선 단말기와 모니터링 콘솔, SIP 서버, 데이터베이스 서버로 시스템을 구성하였다. 실시간 생체 신호모니터링 시스템을 구현함으로써 U-Health 서비스가 가능하게 되고, 의료 서비스의 효율성을 향상시킨다. In this paper, we proposed the real-time bio-signals monitoring system that is based on the ZigBee wireless sensor network and SIP. This system makes medical team and user easily confirm user's medical state irrelative to their location and time. The communication between medical sensors and the user's end device uses the ZigBee wireless sensor network. The power consumption was decreased because wireless sensor network does not use the Ad-hoc routing protocol but routing protocol that is based on tree structure. Our proposed system includes a wireless user's end device, monitoring console, SIP server and database server. This real-time bio-signals monitoring system makes possible to implement the U-health care services and improving efficiency of medical treatment services.