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파동간섭효과를 고려한 다층 박막 구조의 광학특성에 대한 수치해석 연구
심형섭(Hyung Sub Shim),권혁록(Hyuk Rok Gwon),강관구(Kwan Gu Kang),이성혁(Seong Hyuk Lee),김종민(Jong Min Kim),신영의(Young Eui Shin) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.6
The present study is devoted to investigate numerically the optical characteristics of multi-layer thin film structures such as Si/SiO₂ and Ge/Si/SiO₂ by using the characteristic transmission matrix method. The reflectivity and the absorptivity rate for thin film structures are estimated for different incident angles of rays and various film thicknesses. In addition, the influence of wavelength on optical characteristics related to complex refractive index is examined. It is found that such wave-like characteristics are observed in predicting reflectivities and depends mainly on film thickness. Moreover, the present study predicts the film thickness for ignoring wave interference effects, and it also discusses the fundamental physics behind optical and energy absorption characteristics appearing in multi-layer thin film structures.
파동간섭효과를 고려한 다층 박막 구조의 광학특성에 대한 수치해석 연구
沈炯燮(Hyung Sub Shim),李晟赫(Seong Hyuk Lee) 대한전기학회 2006 전기학회논문지C Vol.55 No.5
The present study is devoted to investigate numerically the optical characteristics of multi-layer thin film structures such as Si/SiO₂ and Ge/Si/SiO₂ by using the characteristic transmission matrix method. The reflectivity and the absorptivity rate for thin film structures are estimated for different incident angles of rays and various film thicknesses. In addition, the influence of wavelength on optical characteristics related to complex refractive index is examined. It is found that such wave-like characteristics are observed in predicting reflectivities and depends mainly on film thickness. Moreover, the present study predicts the film thickness for ignoring wave interference effects, and it also discusses the fundamental physics behind optical and energy absorption characteristics appearing in multi-layer thin film structures.