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OHP 필름을 이용한 소프트리소그래피 마스터 제작 및 응용
변재환(Jaehwan Byun),강명우(Myeongwoo Kang),전누리(Noo Li Jeon) 대한기계학회 2011 대한기계학회 춘추학술대회 Vol.2011 No.10
An alternative fabrication material for casting molds using soft-lithography is presented. A commercial OHP film is applied as the substrate of photolithography, as a substitute for silicon or glass wafers. Unlike from conventional wafers, OHP film is flexible, easy and safe to handle, additionally the total cost for making SU-8 patterned master on OHP is less than half of conventional photolithography process due to the extremely low cost. Especially, proper feature quality of patterned PR is achieved for the not only the field of microfluidics but also biochips of micron scale. And we developed a film master holder which enhances the convenience for peeling off PDMS replica from film masters and holds the patterned film flat. Due to the high quality patterned features achieved on film masters, it can be the basis for various applications of photolithography. For instance, flexibility makes it possible to fabricate pseudo 3D molds or in-time double side soft-lithography.
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연주 주편의 열간 연성에 미치는 변형속도 및 재용해의 영향
변재환,손광석,서상철,김진수,이주동,임창희,김인수,이성근,김동규 대한금속재료학회 2005 대한금속·재료학회지 Vol.43 No.3
The effect of strain rate and remelting on hot ductility of low carbon steel were investigated. The specimen was prepared from as cast continuous casting slab, and also the slab was remelted to assess the effect of remelting by which cast structure would be modified. High temperature tensile test was adopted to get the hot ductility data. In case of 0.18 wt.% carbon steel, hot ductility was markedly improved with increasing strain rate in both specimen obtained from as cast slab and remelted slab. Comparing the results obtained from as cast specimen and remelted specimen, it showed similar value of hot ductility in low temperature range, and in high temperature region, showed higher R/A(reduction of area) value in the specimen obtained from remelted slab. The decreased RA value of as cast specimen in high temperature region could be explained by the increase in initial grain size due to slow cooling of large slab during continuous casting. It means that we should presume lower value of hot ductility than the value obtained from remelted specimen in case of lab data application to actual continuous casting process. (Received November 22, 2004)
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