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대기압 플라즈마 유동장에 삽입된 랑뮤어 프로브의 영향에 관한 수치적 연구
백재상(Jae-Sang Baek),황정훈(Jung-Hoon Hwang),이종철(Jong-Chul Lee),김윤제(Youn-Jea Kim) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.11
Atmospheric arc plasmas have been applied to many kinds of industrial materials processing, including welding, cutting, heating and plasma-treatments. Measurements with Langmuir probes, which are the most often used procedures of the plasma diagnostics, interfere with plasma flows a little. In this study, the thermal and fluid dynamic disturbances caused by the insertion of a Langmuir probe into a flowing thermal plasma and the characteristics of atmospheric arc plasma in the absence of a probe are compared. And the main goal of this work is to investigate the influence of a Langmuir probe on the temperature and velocity fields of the arc through the comparison of two cases by computer simulation. Using a commercial code, PHOENICS which uses the conservation equations and current continuity equation have been solved for the temperature distribution within the solid electrodes with the temperature and velocity fields of the plasma flow, simultaneously.
마그네트론 스퍼터링 시스템의 방열 성능 향상에 관한 연구
백재상(Jae-Sang Baek),김태안(Tae-An Kim),김윤제(Youn-Jea Kim) 한국유체기계학회 2006 유체기계 연구개발 발표회 논문집 Vol.- No.-
Magnetron Sputtering system is used extensively for thin-film deposition to a wide variety of commercial and scientific purposes, such as making ultra-thin semiconductors, metal films, etc. It plays important role in a coating system. One of the problems to improve the performance of magnetron sputtering system is the enhancement of heat transfer at the source target. High voltage and electric current are furnished to the source target in order to get the uniform deposition. That energy is converted to heat, which must be removed by the efficient cooling system. Otherwise, it may damage the target, magnets, and substrate as well. Therefore, in order to maintain the uniform deposition, the design of effective cooling system is important. The main parameters affecting the cooling performance are the flow path of cooling water, inlet size and flow rate, etc. In this study, the flow characteristics of inside cooling system with various flow paths of cooling water and flow rates are investigated and results are graphically depicted.