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김우재,방인영,김지환,박연수,온범수,권희태,신기원,권기청 한국진공학회 2021 한국진공학회 학술발표회초록집 Vol.2021 No.2
오늘날, 삼불화질소(NF<SUB>3</SUB>)는 반도체 제조 분야 등의 세정 공정 과정 중 반응성 가스로 사용된다. 이러한 챔버 세정 공정의 경우 NF<SUB>3</SUB>가 챔버 내로 직접 주입된 후 플라즈마를 방전하여 챔버 내부에 증착된 부산물을 제거한다. 본 연구에서는 실리콘(Si)에 용량 결합형 플라즈마 반응성 이온 식각을 수행하며 잔류 가스 분석기(RGA)와 발광 분광 분석법(OES)을 이용해 공정을 모니터링하였다. 동일한 압력에서 RF 전력이 상승함에 따라 SiF<SUB>3</SUB><sup>+</sup>의 양 및 Si의 식각 속도는 증가하였지만, 불소 원자선은 감소하였다. 동일한 RF 전력에서 압력이 높아지면 불소 원자선의 강도, SiF<SUB>3</SUB><sup>+</sup>의 양 및 Si의 식각 속도 모두 증가하였다.
가치명료화 수업 모형을 활용한 중등 정보 교과서의 사이버 윤리 단원 수업 지도자 제안
안성관,김나영,민진희,방인영,주민호 한국인터넷윤리학회 2019 The Digital Ethics(디지털 윤리) Vol.3 No.2
In the age of knowledge informatization, we have benefited a lot, but the dysfunctions have occurred. The lack of ethical awareness among teenagers is a typical dysfunction. In order to solve this problem, information ethics education has been strengthened in the information curriculum, but the effect is still insufficient. Therefore, this study proposed a teaching-learning plan for the cyber ethics unit by utilizing the value-clarification model, which is a teaching model effectively used in ethics subjects. For the plan, this study randomly collected six middle school information textbooks to analyze the composition of middle school information textbooks. Next, each of the six steps of the value clarification model instruction process was analyzed in detail. Then, based on the detailed stages, the “Information Ethics – Cyber Ethics” section of middle school information textbooks was compared and analyzed using a binary scale. According to these results, we identified the shortcomings in cyber ethics lessons with information textbooks and focused on them. The teaching and learning plan proposed in this study will enable information teachers to teach information ethics suitable for the composition of textbooks. In addition, students will become subjects of class by doing subjective activities in class, which will be an effective information ethics class. Ultimately, information ethics of adolescents can be effectively cultivated and this can help solve social problems caused by lack of information ethics.
카욘도마틴 ( Kayondo Martin ),방인영 ( In-young Bang ),유준승 ( Jun-seung You ),서지원 ( Ji-won Seo ),백윤흥 ( Yun-heung Paek ) 한국정보처리학회 2021 한국정보처리학회 학술대회논문집 Vol.28 No.1
Rust is a promising system programming language that made its debut in 2010. It was developed to address the security problems in C/C++. It features a property called ownership, on which it relies to mitigate memory attacks. For this and its many other features, the language has consistently gained popularity and many companies have begun to seriously consider it for production uses. However, Rust also supports safe and unsafe regions under which the foreign function interface (FFI), used to port to other languages, falls. In the unsafety region, Rust surrenders most of its safety features, allowing programmers to perform operations without check. In this study, we analyze the security issues that arise due to Rust’s safety/unsafety property, especially those introduced by Rust FFI.
김우재,신기원,권희태,온범수,박연수,김지환,방인영,권기청,Kim, Woo Jae,Shin, Gi Won,Kwon, Hee Tae,On, Bum Soo,Park, Yeon Su,Kim, Ji Hwan,Bang, In Young,Kwon, Gi-Chung 한국반도체디스플레이기술학회 2021 반도체디스플레이기술학회지 Vol.20 No.1
The number of processes in the manufacture of semiconductors, displays and solar cells is increasing. And as the processes is performed, multiple layers of films and various patterns are formed on the wafer. At this time, substrate warpage occurs due to the difference in stress between each film and pattern formed on the wafer. the substrate warping phenomenon occurs due to the difference in stress between each film and pattern formed on the wafer. We developed a new warpage measurement method to measure wafer warpage during real-time processing. We performed an experiment to measure the presence and degree of warpage of the substrate in real time during the process by adding only measurement equipment for applying additional electrical signals to the existing ESC and detecting the change of the additional electric signal. The additional electrical measurement signal applied at this time is very small compared to the direct current (DC) power applied to the electrostatic chuck whit a frequency that is not generally used in the process can be selectively used. It was confirmed that the measurement of substrate warpage can be easily separated from other power sources without affecting.