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박인수(Insoo Park),박영걸(Yonggul Park),이민규(Minkyu Lee),신동훈(Donghoon Shin),이기성(Keesung Lee),장시열(Siyoul Jang),임홍재(Hongjae Yim),정재일(Jayil Jeong) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.11
Several error sources are analyzed when aligning flexible glasses into the target position used in nano-imprint lithography. When aligning a mold and a target glass, two fiducial marks on each are typically used with machine vision camera in order to eliminate relative positional error. However, the flexibility of the glass and mold can cause error in relative position between two fiducial marks. We investigate these error sources in this work: difference of refraction rates between mold, resin, and the target glass; angular inclination of glasses; shape distortion of the marks due to glass deformation from the gravity. Finally, the design values are suggested as a guidance for designing fiducial marks.