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Plasma Assisted ALD 장비 계발과 PAALD법으로 증착 된 TaN 박막의 전기적 특성
도관우,김경민,양충모,박성근,나경일,이정희,이종현,Do Kwan Woo,Kim Kyoung Min,Yang Chung Mo,Park Seong Guen,Na Kyoung Il,Lee Jung Hee,Lee Jong Hyun 한국반도체디스플레이기술학회 2005 반도체디스플레이기술학회지 Vol.4 No.2
In the study, in order to deposit TaN thin film for diffusion barrier and bottom electrode we made the Plasma Assisted ALD equipment and confirmed the electrical characteristics of TaN thin films grown PAALD method. Plasma Assisted ALD equipment depositing TaN thin film using PEMAT(pentakis(ethylmethlyamino) tantalum) precursor and NH3 reaction gas is shown that TaN thin film deposited high density and amorphous phase with XRD measurement. The degree of diffusion and reaction taking place in Cu/TaN (deposited using 150W PAALD)/$SiO_{2}$/Si systems with increasing annealing temperature was estimated for MOS capacitor property and the $SiO_{2}$, (600${\AA}$)/Si system surface analysis by C-V measurement and secondary ion material spectrometer (SIMS) after Cu/TaN/$SiO_{2}$ (400 ${\AA}$) layer etching. TaN thin film deposited PAALD method diffusion barrier have a good diffusion barrier property up to 500$^{\circ}C$.
일 도시지역 고등학생의 흡연현황과 니코틴 의존도에 관한 연구
정현강(Hyun-Gang Jung),이문수(Moon-Soo Lee),고영훈(Young-Hoon Ko),김승현(Seung-Hyun Kim),조숙행(Sook-Haeng Joe),정인과(In-Kwa Jung),박정란(Jung-Ran Park),박성근(Seong-Guen Park) 한국중독정신의학회 2006 중독정신의학 Vol.10 No.1
Background:The purpose of this study was to investigate the prevalence of smoking, the level of nicotine dependence and smoking-depression relationship among high school students. Methods:Subjects were 839 high school students in Siheung city. The main assessment measures were the Fagerstrom Test for Nicotine dependence and the Zung Self-rating Depression Scale. We also used structured self-report questionnaires which included socio-demographic data, cigarette habit and alcohol consumption. Results:Our study found that the prevalence of smoking in high school students was 20.7%. Among students who had experience of smoking, 7.5% were substantially dependent on nicotine, 46.9% had mild dependence and 45.6% had no dependence. Nicotine dependence was correlated with duration and amount of cigarette smoking. Smokers tend to drink alcohol more frequently than non-smokers (smokers vs non-smokers:3.19±2.57/month vs 2.29±3.35/month). There was significant positive correlation between amounts of smoking and scores of the Zung Self-rating Depression Scale in students who had experience of smoking. Conclusion:More than 10% of high school students initiate cigarette smoking at their early teenage. Cigarette smoking is probably associated with various psychosocial factors such as depression, mental stress and poor primary support group. The-refore, multidisciplinary strategies are required to reduce the prevalence of adolescent cigarette smoking.