YBCO 초전도 박막 특성에 미치는 Sputtering 조건의 영향

박근섭,박용기,이순걸,김경중,문대원,박종철 한국진공학회 1992 한국진공학회 학술발표회초록집 Vol.- No.-

화장품 제조업 근로자의 화학물질 인식도 비교

이상민,박근섭,어원석,Lee, Sangmin,Park, Keun Seop,Eoh, Won Souk 한국안전학회 2020 한국안전학회지 Vol.35 No.2

To identify the relationship between types of employment(regular and non-regular group) and departments classification (administration, product and research group) and the levels of recognition of chemical substances, a total of 117 workers in cosmetics workplaces. Mainly, regular group and research group showed higher recognition of chemical substances (PPE, ventilation, chemical management, hazards in handling chemicals, skin contact) than non-regular group and administration, product group, but In some cases, production and administrative groups were high. Descriptive statistics(SAS ver9.2)was performed. the results of recognition of chemical substances were analyzed the mean and standard deviation by t-test, and anova, (P=0.05). These results cosmetics manufacturing workplaces have normal level of the perception of chemical substances. In most of the employment types, the regular workers showed high recognition, and the working departments showed high recognition in the research and production groups. Therefore, OEM and ODM cosmetics manufacturers regularly identify characteristics and needs of workplaces and workers, and suggest the development of experience and practiced education programs and risk assessment tools that can raise worker awareness.

중소규모 제조업의 건강·안전·실천에 대한 화학물질 인식도 비교

어원석,이상민,박근섭,Eoh, Won Souk,Lee, Sangmin,Park, Keun Seop 한국안전학회 2019 한국안전학회지 Vol.34 No.4

There was a difference in recognition of chemical substances according to cognitive level of GHS, knowledge level of organic solvents and each department of workers. they were showed higher recognition of chemical substances by research group, partially group and good group. To identify the relationship between types of job classification(group of department, group of GHS cognitive level and group of organic solvents knowledge level) and the levels of recognition of chemical substances, a total of 153 workers in a small and medium business workplace. Descriptive statistics(SAS ver 9.2)was performed. the results of recognition of chemical substances were analyzed the mean and standard deviation by t-test, and anova, (P=0.05). These results In general, small- and medium-sized workplaces have low levels of GHS awareness and organic solvents knowledge. The perception of chemical substances according to the departments. In general, the demand for chemical substances education was highly suggested regardless of the job type. There was a significant difference in the perception of health, safety and practice according to the level of GHS cognitive, and a high perception in the incomplete group. There was not much difference in average awareness of health, safety and practice according to organic solvents knowledge level, but there was a high perception in good group. It is very important to regularly check the worker's perception of the workplace and identify problems with the work environment and improve the work environment. In addition, each department presents appropriate safety and health education such as chemical process safety, toxicity of chemical substances and human exposure. We also propose a chemical substances assessment and management plan that integrates safety and health.

중소규모 제조업의 건강 · 안전 · 실천에 대한 화학물질 인식도 비교

어원석,이상민,박근섭 한국안전학회 2019 한국안전학회지 Vol.34 No.4

There was a difference in recognition of chemical substances according to cognitive level of GHS, knowledge level of organic solvents and each department of workers. they were showed higher recognition of chemical substances by research group, partially group and good group. To identify the relationship between types of job classification(group of department, group of GHS cognitive level and group of organic solvents knowledge level) and the levels of recognition of chemical substances , a total of 153 workers in a small and medium business workplace. Descriptive statistics(SAS ver 9.2)was performed. the results of recognition of chemical substances were analyzed the mean and standard deviation by t-test, and anova, (P=0.05). These results In general, small- and medium-sized workplaces have low levels of GHS awareness and organic solvents knowledge. The perception of chemical substances according to the departments. In general, the demand for chemical substances education was highly suggested regardless of the job type. There was a significant difference in the perception of health, safety and practice according to the level of GHS cognitive, and a high perception in the incomplete group. There was not much difference in average awareness of health, safety and practice according to organic solvents knowledge level, but there was a high perception in good group. It is very important to regularly check the worker's perception of the workplace and identify problems with the work environment and improve the work environment. In addition, each department presents appropriate safety and health education such as chemical process safety, toxicity of chemical substances and human exposure. We also propose a chemical substances assessment and management plan that integrates safety and health.

The Effect of Substrate Surface Treatment by Ion Bombardment on Y - Ba - Cu - O Thin Film Growth

김경중(Kyung Joong Kim),박근섭(Keunseup Park),박용기(Yong Ki Park),문대원(Dae Won Moon) 한국진공학회(ASCT) 1994 Applied Science and Convergence Technology Vol.3 No.1

SrTiO₃(100) 단결정을 3 keV 아르곤 이온으로 에칭하면 표면 원소의 산화 상태가 환원되고 표면의 거칠기가 증가하는 것이 XPS와 SEM으로 측정되었다. 그러나 3 keV의 산소이온으로 에칭하면 표면 원소의 화학적 상태도 변하지 않고 표면도 평탄한 상태로 계속 유지된다. 산소 이온에 의하여 에칭된 SrTO₃ 기판상에 off-axis rf 스퍼트링 방법으로 성장된 YBa₂Cu₃O_x 박막이 아르곤 이온에 의하여 에칭된 SrTiO₃ 기판상에 성장된 YBa₂Cu₃O_x 박막보다 높은 T_(c, zero) and J_c를 보여주었다. 이 논문은 YBCO 초전도 박막의 성장과 전자공학적 활용올 위한 리토그라피 공정에서 이온밀링 공정의 조건은 매우 주의하여 선택되어야 함을 보여준다. When the surface of SrTiO₃(100) single crystal was etched by 3 keV Ar^+ ion milling, it was observed through XPS and SEM measurements that the oxidation states of elements on the surface were reduced and the surface was roughened. The surface of SrTiO₃ etched by 3 keV O₂^+ ion milling, however, remained smooth and the chemical states were not changed. YBa₂Cu₃O_x. thin film deposited by off-axis rf sputtering on SrTiO₃ cleaned by O₂^+ ion bombardment has higher T_(c, zero) and J_c at 77K than that on the substrate sputtered by Ar^+ ions. This report suggests that the ion milling condition must be carelfully selected for substrate cleaning and lithographic processings for YBCO superconductor thin film growth and microelectronic applications.

저진공게이지 종합특성 평가장치 개발

홍승수,정광화,신용현,임인태,박근섭,정원호 한국진공학회 2002 Applied Science and Convergence Technology Vol.11 No.4

진공기술기반구축사업의 진공 측정기기 평가장치 구축사업으로 저진공($10^{-1}$Pa~$10^{5}$ Pa)게이지 종합특성 평가장치를 설계제작하였다. 이 장치를 이용하여 열전도형 게이지의 정확도, 직선성, 반복성, 기체감도, 그리고 장기 안정성 등에 대한 특성 평가를 수행하였다. We have developed a characteristics evaluating system for low vacuum gauges with a project of basis of vacuum technology construction. By using this system, we also performed a characteristics evaluation as to the accuracy, linearity, repeatability, gas sensitivity, and long-term stability of thermal conductivity gauges.

MOCVD로 성장한 Zn-doped InGaN의 광특성 연구

이창명,이주인,임재영,신은주,김선운,서준호,박근섭,이동한 한국진공학회 2001 Applied Science and Convergence Technology Vol.10 No.1

Optical investigation on Zn-doped InGaN grown by MOCVD was performed by using the photoluminescence. Two different spectra related to Zn-acceptor-like centers occurred at room temperature, with broad emissions peaking at 2.81, and 2.60 eV, Specially, emissions interacted with phonon were observed at 2.81 eV where phonon energy was 92.5 meV From temperature dependent blue-band emissions of InGaN, we observe that the intensity in high energy region was quickly decreased more than that in low energy region with increased temperature, and the peak position at 2.81 eV was blue shift of about 18 meV, The blue-band emmissions would be originated from the transition related to the localized Zn complex centers. MOCVD법으로 성장한 Zn-doped InGaN의 광학적 특성을 photoluminescence를 사용하여 연구하였다. 상온에서 Zn와 관련한 acceptor-like conte들에 대한 넓은 스펙트럼들은 2.81 eV와 2.60 eV에서 관측되었다. 특히, 2.81 eV영역에서는 포논과의 상호작용에 의한 스펙트럼이 나타났으며, 포논 에너지가 $\omega$=92.5 meV의 값을 가짐을 확인하였다. InGaN 시료의 온도 변화에 대한 스펙트럼에서, 온도가 증가함에 따라 청색 발광을 기준으로 낮은 쪽의 에너지에 비해 높은 에너지 쪽의 발광이 빠른 감소를 가져왔으며 아울러 2.81eV 영역에 해당하는 스펙트럼은 18meV만큼 높은 에너지 쪽으로 이동함을 관측하였다. 그러므로 청색 영역에서의 발광은 Zn와 관련된 complex conte체서의 국소화된 천이에 따른 결과이다.

산화물 박막의 원자층 제어 성장을 위한 레이저 MBE 용 PLD 장치의 제작

허윤성,김인선,정원호,황지현,손재일,차덕준,박용기,박근섭 한국진공학회 2000 한국진공학회 학술발표회초록집 Vol.- No.-