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문정현,강인호,김형우,석오균,방욱,하민우 한국물리학회 2020 Current Applied Physics Vol.20 No.12
The use of SiO2/4H–SiC metal-oxide-semiconductor field-effect transistors (MOSFETs) can be problematic due to high interface state density (Dit) and low field-effect mobility (μfe). Here, we present a tetra-ethyl-ortho-silicate (TEOS)-based low-pressure chemical vapor deposition (LPCVD) method for fabricating the gate oxide of 4H–SiC MOSFETs using nitric oxide post-deposition annealing. SiO2/4H–SiC MOS capacitors and MOSFETs were fabricated using conventional wet and TEOS oxides. The measured effective oxide charge density (Qeff) and Dit of the TEOS-based LPCVD SiO2/4H–SiC MOS capacitor with nitridation were 4.27 × 1011 cm 2 and 2.99 × 1011 cm 2eV 1, respectively. We propose that the oxide breakdown field and barrier height were dependent on the effective Qeff. The measured μfe values of the SiO2/4H–SiC MOSFETs with wet and TEOS oxides after nitridation were, respectively, 11.0 and 17.8 cm2/V due to the stable nitrided interface between SiO2 and 4H–SiC. The proposed gate stack is suitable for 4H–SiC power MOSFETs.
문정현,이명선 한국피부과학연구원 2013 대한피부미용학회지 Vol.11 No.3
The purpose of this study was to examine which influence the stone therapy has upon improvement in low back pain and abdominal obesity. Research subjects were adult women who dwell in Daejeon area. 12 adult women were randomly selected who have over 23 for BMI(body mass index) of body fat and over 6 points for low back pain. It was carried out three times a week for 8 weeks with 50 minutes per once. 6 people for the experimental group were carried out stone and manual therapy. 6 people for the control group were carried out manual therapy. Thus, the following conclusions were obtained. First, both the experimental group and the control group had effect of reduction in abdominal circumference. The effect of body fat mass had significant difference only in a group with parallel execution of stone therapy management and manual therapy. Second,both the experimental group and the control group had effect of reduction in low back pain. However, the effect was indicated to be significantly higher in a group with parallel execution of stone therapy management and manual therapy. Accordingly, the heat therapy of using stone therapy increased skin temperature in the body. Hence, the abdominal massage with parallel execution of stone and manual therapy was indicated to have positive effect on response to adult obesity and low back pain.