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광식각공정 클린룸에서의 기류 및 교차오염에 대한 수치적 연구
노광철(Kwang-Chul Noh),이승철(Seung-Chul Lee),오명도(Myung-Do Oh) 대한기계학회 2003 대한기계학회 춘추학술대회 Vol.2003 No.11
We performed the numerical study on the characteristics of the airflow and cross contamination in<br/> the photolithography process cleanroom. The nonuniformity, the deflection angle and the global cross<br/> contamination were used for analyzing the characteristics and performances of cleanroom. We knew that<br/> the airflow characteristics of the cleanrooms are largely affected by the porosity of panel and the<br/> adjustment of dampers. And the numerical result showed that the global cross contamination varies with<br/> the location of source and the passage of time.
노광철(Kwang-Chul Noh),이영호(Young-Ho Lee),오명도(Myung-Do Oh) 대한기계학회 2003 대한기계학회 춘추학술대회 Vol.2003 No.4
We investigated the amount of the toxic gases emitted from the Electrostatic Precipitators(ESPs), which were<br/> currently used by indoor air cleaners. We used the wire-to-plate(WTP) type and the needle-to-plate(NTP) type<br/> corona discharger in our study. Using the voltage, the polarity of wire, the number of needles of NTP as the<br/> input variables, we studied the characteristic of Ozone and NOx generation in the ESPs. As the results, we<br/> found out that the concentration of Ozone, NO2 and NOx is increased, but the amount of NO is decreased<br/> with increasing the voltage and the number of needles. And we knew that the generation rate of ozone and<br/> NOx is very related with the corona region.
노광철(Kwang-Chul Noh),황정호(Jungho Hwang),오명도(Myung-Do Oh),이승철(Seung-Chul Lee) 대한설비공학회 2012 대한설비공학회 학술발표대회논문집 Vol.2012 No.6
Cleanrooms are common facilities in IT, pharmaceutical, and food industries, and hospitals. Cleanrooms are 10 to 100 times as energy intensive as office buildings. Therefore, it has become an important issue to reduce cleanroom energy consumption. The energy consumed by fans account for a large portion of cleannrom energy use. In recirculation systems, pressurized plenum design is estimated to be more energy efficient than FFU or ducted HEPA design. In FFU design, which has been used in most industrial cleanroom of Korea, increase up to 70% in the energy efficiency of FFU is needed in order to reach a similar level of the energy use in pressurized plenum design. It is apparent that reduction in airflow rates of outdoor intake air and exhaust air leads to saving the fan energy use related with the make-up air system.
노광철(Kwang-Chul Noh),이승철(Seung-Chul Lee) 대한설비공학회 2010 설비공학 논문집 Vol.22 No.4
We performed 3-dimensional numerical study on the improvement of the airflow deflection in the cleanroom of Class 1000, which is presently operated for the manufacturing process in Korea. The Deflection angle and the non-uniformity were investigated to analyze the airflow characteristics and the performance of cleanroom with variations of the cleanroom occupancy state, the filters’ arrangement, and the floor return air system. From the numerical results, we found out that the airflow pattern of the cleanroom is more unidirectional and stable in the condition of at-rest than in the condition of as-built. It is due to that the equipments installed in the cleanroom play a role like partitions, which prevent the airflow from inclining toward the recirculation air duct. And it is needed to arrange the filter units parallel to the equipments array without a gap between them for maintaining the unidirectional airflow pattern. Finally, we knew that it is very important to install the partition like the eyelid above the equipment to keep the unidirectional airflow around the equipments and remove the contaminants quickly.
코로나 방전 방식에 따른 전기집진기의 오존, NO<sub>x</sub> 발생 및 입자제거 특성
노광철,이영호,오명도,Noh, Kwang-Chul,Lee, Young-Ho,Oh, Myung-Do 대한기계학회 2003 大韓機械學會論文集B Vol.27 No.10
We investigated the amount of the toxic gases emitted from the Electrostatic Precipitators(ESPs), which are currently used as the indoor air cleaners. The existing wire-to-plate(WTP) and neddle-to-plate(NTP) types of ESP designs are considered as the experimental corona dischargers. Using the voltage, the polarity of wire, the number of needles of NTP as the input variables, we studied the generation characteristics of ozone and $NO_{x}$ and the particle removal efficiency in the ESPs. As the results, we found out that the concentration of ozone, $NO_{2}$ and $NO_{x}$ is increased with increasing the voltage and the number of needles, but the amount of NO is decreased. And we observed that the generation rates of ozone and $NO_{x}$ are mainly related with the corona region through the photographs. Finally the experimental results showed that the particle removal efficiency of ESP with WTP type charger is more superior to that with NTP type chargers at the same voltage.
클린룸 국소환경에서 오염원의 위험율에 대한 수치해석적 평가
노광철,Noh, Kwang-Chul 한국입자에어로졸학회 2018 Particle and Aerosol Research Vol.14 No.4
In this study, the risk rates of different contamination sources of the contaminant in a minienvironment were analyzed through Computational Fluid Dynamics (CFD) simulation. The airflow pattern characteristics can only predict the qualitative variation of contaminant concentration, but cannot evaluate the quantitative variations in the risk rate of sources. From the results, the ambient contamination sources mainly affect wafers in the Front Opening Unified Pod (FOUP), whereas the internal contamination sources mainly affect wafers laid on the robot arm in the minienvironment. And the purging plenum system is very useful in protecting the wafers in the FOUP from contaminants transferred from the Fan Filter Unit (FFU). However, this system is unable to protect the wafers on the robot arm from internal contaminants and the wafers in the FOUP from sources of the interface between the FOUP and the minienvironment.
노광철(Kwang-Chul Noh),이승철(Seung-Chul Lee),한창우(Chang-Woo Han) 대한설비공학회 2010 대한설비공학회 학술발표대회논문집 Vol.2010 No.6
A numerical study on the improvement of the airflow deflection in the cleanroom of KS M ISO Class 6. The Deflection angle and the non-uniformity were investigated to analyze the airflow characteristics and the performance of cleanroom with variations of the cleanroom occupancy state, the filters' arrangement, and the floor return air system. From the results, the airflow pattern of the cleanroom is more unidirectional and stable in the at-rest condition than in the as-built condition. It is due to that the equipments installed in the cleanroom play a role like partitions, which prevent the airflow from inclining toward the recirculation air duct. It was known that it is very important to install the partition like the eyelid above the equipment to keep the unidirectional airflow around the equipments and remove the contaminants quickly.