A numerical study on the improvement of the airflow deflection in the cleanroom of KS M ISO Class 6. The Deflection angle and the non-uniformity were investigated to analyze the airflow characteristics and the performance of cleanroom with variations ...
A numerical study on the improvement of the airflow deflection in the cleanroom of KS M ISO Class 6. The Deflection angle and the non-uniformity were investigated to analyze the airflow characteristics and the performance of cleanroom with variations of the cleanroom occupancy state, the filters' arrangement, and the floor return air system. From the results, the airflow pattern of the cleanroom is more unidirectional and stable in the at-rest condition than in the as-built condition. It is due to that the equipments installed in the cleanroom play a role like partitions, which prevent the airflow from inclining toward the recirculation air duct. It was known that it is very important to install the partition like the eyelid above the equipment to keep the unidirectional airflow around the equipments and remove the contaminants quickly.