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신규 합성 전구체를 이용한 원자층 증착법 기반 텅스텐 박막의 성장 메커니즘 및 박막 물성 비교 연구
이유진(Yujin Lee),서승기(Seunggi Seo),남태욱(Taewook Nam),이현호(Hyunho Lee),윤휘(Hwi Yoon),선상규(Sangkyu Sun),오일권(Il-Kwon Oh),이상훈(Sanghun Lee),서진형(Jin Hyung Seo),석장현(Jang Hyeon Seok),김형준(Hyungjun Kim) 대한전자공학회 2021 대한전자공학회 학술대회 Vol.2021 No.6
Tungsten (W) has a wide range of industrial applications since it has several advantages such as high conductivity, thermal stability, and electromigration durability. We report the properties of plasma-enhanced atomic-layer-deposited (ALD) tungsten (W) thin films. ALD is promising deposition method for obtaining thin films with good conformality, good uniformity, and low impurity contamination, as its growth mechanism is entirely based on self-limited surface reaction. Thus, the choice of an appropriate precursor for ALD is critical for obtaining high-quality films. We comparatively investigate the growth characteristics and film properties using two newly synthesized precursors, tungsten pentachloride (WCl5) and ethylcyclopentadienyltungsten(Ⅴ) tricarbonyl hydride (HEtCpW(CO)₃), and Ar/H₂ plasma as the reactant. Growth characteristics and film properties were significantly affected by ligands of precursors. These results provide fundamental and useful information, with respect to the selection of the suitable precursor, for practical implementation of device fabrication.
자동차용 배기계 실차응력 및 DYNAMIC STRESS와의 상관성 비교
이종범(Jongbum Lee),박주상(Joosang Park),신규철(Gyuchul shin),남태욱(Taewook Nam),이정오(Jungoh Lee) 한국자동차공학회 2002 한국자동차공학회 춘 추계 학술대회 논문집 Vol.2002 No.5_3
Automobile exhaust systems play a role silently introducing the exhaust gas which have hig pressure and high temperature due to the gas excitation of poweruains to the ambient air. Exhaust systems was exposed to severe mechanical environment which is high temperature, longer structure than other automobile components, and corrosional problems due to water and calcium chloride.<br/> There are stress evaluations in vehicle among experimental approach methods for us to develop exhaust systems with being satisfied with the customer's requirement. But at the initial development stage of exhaust systems, we have no proto test samples, so that we could not carry out the stress evaluation in vehicle. Especially the experimental approach has a limitatio<br/> to obtain stress distribution of all region exhaust systems because of highly time and cost consuming. In our study, after comparing the stress test results through the stress evaluation i vehicle and the dynamic stress using CAE technique for existing exhaust systems, we tried to find methods to predict the stress results, and to build new processes for reliable evaluation of automobile exhaust systems.