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Bonded SOI wafer의 top Si과 buried oxide layer의 결함에 대한 연구
김석구,백운규,박재근,Kim Suk-Goo,Paik Un-gyu,Park Jea-Gun 한국재료학회 2004 한국재료학회지 Vol.14 No.6
Recently, Silicon On Insulator (SOI) devices emerged to achieve better device characteristics such as higher operation speed, lower power consumption and latch-up immunity. Nevertheless, there are many detrimental defects in SOI wafers such as hydrofluoric-acid (HF)-defects, pinhole, islands, threading dislocations (TD), pyramid stacking faults (PSF), and surface roughness originating from quality of buried oxide film layer. Although the number of defects in SOI wafers has been greatly reduced over the past decade, the turn over of high-speed microprocessors using SOI wafers has been delayed because of unknown defects in SOI wafers. A new characterization method is proposed to investigate the crystalline quality, the buried oxide integrity and some electrical parameters of bonded SOI wafers. In this study, major surface defects in bonded SOI are reviewed using HF dipping, Secco etching, Cu-decoration followed by focused ion beam (FIB) and transmission electron microscope (TEM).
유류오염에 따른 해양환경피해의 측정 : 조건부 가치측정법을 이용하여
김석구 ( Suk Goo Kim ),김태유 ( Tai Yoo Kim ) 한국경제학회 2002 經濟學硏究 Vol.50 No.3
On the threshold of the 21st century as the concern about environment has been rapidly growing, more attention has been given to the research on valuation of environmental goods. In Korea, large-scale oil pollution accidents, such as the 1995 leakage of the oil tanker Sea-Prince, have often occurred in its waters. The purpose of this paper is to value the marine environmental damage brought about by the Sea-Prince. To this end, we apply contingent valuation method. It is concluded that the results of the paper could be an important reference in the making of a compensation policy for pollution.