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플라즈마 공중합 고분자 절연막과 펜타센 반도체막의 계면특성
신백균(Paik-Kyun Shin),임헌찬(H-C Lim),육재호(J-H Yuk),박종관(J-K Park),조기선(G-S Jo),남광우(K-Y Nam),박종국(J-K Park),김용운(Y-W Kim),정무영(M-Y Chung) 대한전기학회 2009 대한전기학회 학술대회 논문집 Vol.2009 No.7
Thin films of pp(ST-Co-VA) were fabricated by plasma deposition polymerization (PVDPM) technique. Properties of the plasma polymerized pp(ST-Co-VA) thin films were investigated for application to semiconductor device as insulator. Thickness, dielectric property, composition of the pp(ST-Co-VA) thin films were investigated considering the relationship with preparation condition such as gas pressure and deposition time. In order to verify the possibility of application to organic thin film transistor, a pentacene thin film was deposited on the pp(ST-Co-VA) insulator by vacuum thermal evaporation technique. Crystalline property of the pentacene thin film was investigated by XRD and SEM, FT-IR. Surface properties at the pp(ST-Co-VA)/pentacene interface was investigated by contact angle measurement. The pp(ST-Co-VA) thin film showed a high-k (k=4.6) and good interface characteristic with pentacene semiconducting layer, which indicates that it would be a promising material for organic thin film transistor (OTFT) application.
김용운,이준섭,Kim, Y.W.,Lee, J.S. 한국전자통신연구원 2020 전자통신동향분석 Vol.35 No.6
ISO/TC 268, IEC Systems Committee on Smart Cities, ISO/IEC JTC 1/WG 11, and ITU-T SG 20 have been developing smart city-related standards since 2013. ISO/TC 268 and ITU-T SG 20 have provided various and lots of smart city standards relatively. In this paper, the status of the standardization activities of ITU-T SG 20, the IEC Systems Committee on Smart Cities, ISO/TC 268, and ISO/IEC JTC 1/WG 11 is reviewed.