http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
서유석,박대규,정철모,김상범,손평근,이승진,김한민,양홍선,박진원,Seo, Yu-Seok,Park, Dae-Gyu,Jeong, Cheol-Mo,Kim, Sang-Beom,Son, Pyeong-Geun,Lee, Seung-Jin,Kim, Han-Min,Yang, Hong-Seon,Park, Jin-Won 한국재료학회 2001 한국재료학회지 Vol.11 No.6
통계적 방법을 사용하여 스퍼터 증착한 Ta 박막의 증착속도, 비저항, 면저항 균일도, 반사도, 응력 등의 물성을 측정하고 분석하였다. RS/1의 표면 반응 분석법에 의해 독립변수와 종속변수간의 함수관계를 예측하였으며. 이때 비저항과 면저항의 균일도 측면에서 최적조건은 증착 압력 2 mTorr, 증착 전력 8 W/$\textrm{cm}^2$ 및 기판온도 $20^{\circ}C$였다. 실험 모텔의 신뢰성 (fitness)은 풀링(pooling)하지 않은 경우 0.85 ~0.9의 값을 얻었다. 본 조건하에서 증착된 박막은 비저항 180$\mu$$\Omega$cm와 면저항 균일도 ~ 2%의 값을 가졌다. 투과전자 현미경과 X선 회절법을 이용하여 분석한 결과 증착된 박막은 100~200 정도의 결정립 크기를 갖는 $\beta$-Ta 임을 확인하였다. We report the characteristics and the dependence of sputter-deposited Ta films on the process parameters. The properties of as-deposited Ta films such as deposition rate, resistivity, Rs uniformity, reflectivity, and stress were investigated and analyzed as a function of process parameter using a statistical experimental method. The functional relationships between the independent and dependent variables were predicted by surface response. The optimal deposition condition of DC magnetron sputtered Ta films was obtained at the chamber pressure of 2 mTorr, power density of 8 W/$\textrm{cm}^2$, and substrate temperature of 2$0^{\circ}C$ by means of resistivity and Rs uniformity. The fitness value for quadratic model as evaluated by the R- square was 0.85~ 0.9 without pooling. The as-deposited Ta films exhibited the resistivity of ~180$\mu$$\Omega$cm with Rs uniformity of ~2%. The transmission electron microscopy and x-ray diffractometry identified that the phase of as-deposited film was $\beta$-Ta having the grain size of 100~200.
김해성(Kim, Hae-Sung),정철모(Jeong, Cheol-Mo) 한국도시행정학회 2012 도시 행정 학보 Vol.25 No.1
The purpose of this study is to establish a definite guideline and realistic system for compensation of business loss incurred in public projects for prompt dispute resolution and fair remedy of private rights. For the research method, it used literature study through the review of the existing laws, precedent studies and judicial precedent. and survey analysis. The study result reveals general problems which are summarized as irrationality and incompleteness in compensation related laws and regulations such as 「Act on the Acquisition of Land for public projects and the Land Compensation」. This study presents system improvement proposals as follows with focus on the related laws and regulation on compensation system for business loss incurred by public projects; First, 「Act on the Acquisition of Land for Public Projects and the Land Compensation 」shall be revised so that business loss suffered by independent businessmen, who have registered for business license pursuant to Income Tax Act and VAT Act at an unlicensed building within public project area, may be compensated. Second, business loss suffered by real estate lessors who have registered for business license and leasing business at a lawful place within public project area shall be eligible for compensation. For this purpose, applicable provisions shall be added to「 business loss compensation assessment guideline」so that compensational assessment may be available. Third, System improvement is required such as new additions of applicable provisions to「Act on the Acquisition of Land etc for public projects and the Compensation therefor Enforcement rule」, so that preemptive remedy may be available to loss compensation pursuant to「 Act on the Acquisition of Land etc for Public Projects and the Compensation therefor」in case business loss is obviously expected to happen the business, which duly registered for business license at a lawful place outside public project area, due to noise, vibration, dust. This paper tried to present reasonable alternatives to business loss compensation in time of implementing public projects by reviewing existing laws, precedent studies, compensation system of foreign countries and judicial precedents etc. For preparation of definite guideline and establishment of reasonable system, more in-depth reviews and supplements are considered to be required in the course of government’s future legislation policy discussion process.