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白主烈(Ju-Yeoul Baek),權九翰(Gu-Han Kwon),李相?(Sang-Woon Lee),李起岩(Ky-Am Lee),李尙勳(Sang-Hoon Lee) 대한전기학회 2006 전기학회논문지C Vol.55 No.2
In this paper, we fabricated and evaluated polydimethylsiloxane(PDMS)-based flexible and implantable micro electrodes. The electrode patterning was carried out with the photolithography and chemical etching process after e-beam evaporation of 100 ÅTi and 1000 Å Au. The PDMS substrate was treated by oxygen plasma using reactive ion etching(RIE) system to improve the adhesiveness of PDMS and metal layers. The minimum line width of fabricated micro electrode was 20 ㎛. After finished patterning, we did packaging with PDMS and then brought up the electrode's part about 40 ㎛ with gold electroplating. The Hank's balanced salt solution(HBSS) test was carried out for 6 month for endurance of fabricated micro electrode. We carried out in-vivo test for the evaluation of biocompatibility by implanting electrodes under the ICR mouse skin for 42 days.
PDMS 마이크로채널 유체유동에 미치는 표면거칠기에 관한 연구
김영민(Young-Min Kim),김우승(Woo-Seung Kim),이상훈(Sang-Hoon Lee),백주열(Ju-Yeoul Baek) 대한기계학회 2004 대한기계학회 춘추학술대회 Vol.2004 No.4
Experiments were conducted to investigate the flow characteristics of water through rectangular PDMS microchannels with a hydraulic diameter ranging from 66.67 to 200 ㎛. In the experiments, the flow rate and pressure drop across the microchannels were measured at steady states. The experimental results were compared with the predictions from the conventional laminar flow theory. A significant difference between the experimental data and the theoretical predictions was found. Experimental results indicate that the pressure gradient and flow friction in microchannels are higher than those from the conventional laminar flow theory. This may be attributed to the fact that there exists effect of surface roughness of the microchannels. In this study, a surface roughness model is implemented to interpret the experimental data. A good agreement between the experimental data and the numerical predictions with a surface roughness model were found.
스퍼터링 조건에 따른 Co 박막의 증착속도 및 미세구조의 변화
백주열,박창만,최영근,이기암,황도근 단국대학교 신소재기술연구소 1992 신소재 Vol.2 No.-
DC 마그네트론 스퍼터링법으로 제조된 코발트 박막에 대해 증착속도 및 미세구조에 미치는 스퍼터링조건의 영향을 조사하였다. 증착속도는 투입전력이 커질수록 증가하였으며, 아르곤 압력이 커질수록 감소하였는데, 이는 투입전력의 증가로 인한 타게트 표면의 이온전류 밀도의 상승과 Ar 압력증가에 따른 비산효과의 증대로 인한 타게트 표면의 이온 전류 밀도의 감소로 고찰되었다. 투입전력이 커질수록 결정립의 크기가 감소하였으며, 투입 전력에 관계없이 특정한 면이 발달하지 않는 비정실 구조를 나타내었다. Ar 압력에 관계없이 비정질 구조를 나타내었다. We have investigated the influence of sputtering condition on deposition rate and microstructure of Co thin film produced by the method of DC Magnetron Sputtering. Deposition rate increased with the input power due to the rise in ionic current density on the surface of target, and decreased with the pressure of Ar gas due to the decrement of ionic current density by the effect of diffusion. Microstructure of the Co thin film became a finer structure with the increase in the input power, and showed amorphous irrespective of the charge of the input power and the pressure of Ar gas.