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개선형 ISPM에서 공기역학적 렌즈의 최적조건에 대한 실험적 연구
임효재,차옥환,설용태 한국반도체디스플레이기술학회 2004 반도체디스플레이기술학회지 Vol.3 No.2
An experimental study was conducted on the optimal configuration and size of ADFL(Aerodynamic Focusing Lens) which used in modified ISPM(In-Situ Particle Monitoring). The particle counting efficiency has been known as a function of distance and size of ADFL, thus we varied these parameters to find out the optimum values. From a result of experiment, it was found that two lenses and 6mm space between them showed a maximum particle measuring efficiency. To apply this modified ISPM to semiconductor manufacturing field, we need more experiment about the pressure change, flow rate, and input particle size.
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임효재,안재용,백성구,정명균 대한설비공학회 2003 설비공학 논문집 Vol.15 No.1
An experimental study was performed to investigate the turbulence intermittency measuring methods across the boundary layer in the transition region. A single type hot-wire probe was used to measure instantaneous streamwise velocities in laminar, transitional and turbulent boundary layer To estimate wall shear stresses on the flat plate, near wall mean velocities are applied to the principle of CPM. Distribution of intermittency factor is obtained by dual-slope method and compared to the results of four methods,$\'{u},\;\{U}$, TERA and M-TERA method. In these methods, M-TERA shows a good agreement in the near wall region. However, the result of M-TERA method shows that intermittency factor is underestimated in the outer part and outside of the boundary layer and the dimensional constant of M-TERA method should be changed appropriately depending on measuring point.
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