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Downscaling Study of Uncooled a-Si Infrared Microbolometer Cell based on Simulation
Jun-Kyo Jeong,Byeong-Jun Jeong,Jae- Sub Oh,Ga-Won Lee 대한전자공학회 2020 Journal of semiconductor technology and science Vol.20 No.1
This study analyzes the response time, that is, thermal time constant of an uncooled amorphous silicon (a-Si) infrared (IR) microbolometer cell based on simulation when the device is downscaled for higher resolution. For accurate analysis, an 8080 array of a-Si microbolometer was fabricated with a 35 μm pixel size. The real device was used to extract the external environmental parameter for the simulation where temperature coefficient of resistance (TCR) of a-Si is also modeled to include temperature-dependence. It is known qualitatively that the cell geometries like as the length of the resistance layer and width of the leg are key factors for the time constant of the device. When the pixel is downscaled to 17 μm, the time constant is found to increase as the length of the resistance layer becomes narrower, but this tendency is reversed for the width of the leg. This is because the influence of each component on the total resistance is changed according to the cell area, which is efficiently optimized by the simulation analysis.
곽동민(Dongmin Kwak),이용헌(Yonghun Lee),김성준(Sungjun Kim) 한국정보기술학회 2021 Proceedings of KIIT Conference Vol.2021 No.11
기존의 개인병사체계용 야간투시경은 광증폭 방식을 사용하여 병사체계에서 개인병사 간에 획득한 전장정보를 공유하는 것이 제한된다. 본 논문에서는 개인병사용 헬멧에 장착하여 운용 가능한 주야간 영상획득모듈과 전장정보 공유를 위한 영상 인터페이스를 제안하였다. 주야간 영상획득 모듈은 주간 중 시계와 열상 배율의 복합 광학으로 구성하여 운용편의성을 확보하였다. The existing night vision for personal soldier system uses optical light intensifier module and tactical information sharing with others is restricted. In the research, we propose helmet-mounted image acquisition module for day/night surveillance and tactical information sharing. Considering operational connivence, we designed complex optics for operational convenience consist of dual FOV(Field of View) for day cameras and 1 magnification of IR camera
PECVD 이용한 비정질 실리콘형 마이크로 볼로미터 특성
강태영,김경환 한국반도체디스플레이기술학회 2012 반도체디스플레이기술학회지 Vol.11 No.4
We report microbolometer characteristic with n-type and p-type amorphous silicon thin film. The n-type and p-type amorphous silicon thin films were made by PECVD. The electrical properties of n-type and p-type a-Si:H thin films were investigated as a function of doping gas flow rate. The doping gas used B2H6/Ar (1:9) and PH3/Ar (1:9). In general, the conductivity of doping a-Si:H thin films increased as doping gas increase but the conductivity of a-Si:H thin films decreased as the doping gas increase because doping gas concentration increase led to dilution gas (Ar) increase as the same time. We fabricated an amorphous silicon microbolometer using surface micromachining technology. The fabricated microbolometer had a negative TCR of 2.3%. The p-type microbolometer had responsivity of 5×104 V/W and high detectivity of 3×108 cm(Hz)1/2/W. The p-type microbolometer had more detectivity than n-type for less noise value