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전해연마면의 표면경도 향상을 위한 플라즈마 이온질화 처리법에 관한 실험적 연구
김진범,홍필기,서태일,손창우 한국금형공학회 2019 한국금형공학회지 Vol.13 No.1
The size and prospects of the domestic semiconductor equipment market are increasing every year. In the case of various parts used inside semiconductor equipments, high durability such as high strength and abrasion resistance is demanded. Particularly, the gases used in semiconductor production processes are toxic. In order to prevent such toxic gas leakage, a precision processing technique and a surface treatment technique for preventing corrosion are required. Electro-polishing is an electro-chemical method of polishing a metal surface to make it smooth and polished. Electro-polishing is mainly used in the finishing process of metal surface. Unlike mechanical polishing, electro-polishing is used in many fields, such as fine chemical etching equipment, since no damaged layer or burr, fine polishing groove and particles are generated. However, in order to withstand the gas used in the semiconductor equipment, the parts must have high corrosion resistance. However, the surface hardness generally become lowered through electro-polishing. Therefore, in this study, surface hardness were experimentally observed before and after electro-polishing. Then, a method of improving hardness by preparing a nitrided layer by plasma ion nitriding treatment.
윤종호,이재종,이응숙,이동주,김영호 한국공작기계학회 2004 한국공작기계학회 춘계학술대회논문집 Vol.2004 No.-
Electro-rheological fluid is recently used for the micro polishing of 3-dimensional micro-aspherical lens. It's also used for polishing small area defects on the wide flat wafer. Since ER fluid shows a behavior of viscosity changing under certain electric fields, micro polishing efficiency may be enhanced for certain cases. In this paper, a perfluorinated carbonyl fluoride oil based ER fluids was used to improve surface polishing rate and submicron-scale accuracy. As the polishing electrodes, micro size cylindrical tools had been used for maximizing the electric field. An experimental device, which was applied for micro polishing a number of wafers of 4 inches in size and other workpieces, was made on a precision polishing system. It consisted of a steel electrode, a wafer fixture, 10mA current and DC 5kV power supply unit, and a controller unit. From the Experiments, the ER fluid is applicable for micro polishing of small parts.
MR Polishing과 EP 복합공정에 의한 SUS 304의 표면품위 거동에 관한 연구
하석재(S.J.Ha),이정원(J.W. Lee),홍광표(K.P. Hong),조용규(Y.K.Cho),김동우(D.W. Kim),조명우(M.W. Cho) 한국소성가공학회 2011 금형가공 심포지엄 Vol.2011 No.9
Recently, the magnetorheological (MR) polishing process has been examined as a new ultra-precision polishing technology for mirror surface generation in many applications, such as aspheric lenses, biochips, micro parts, etc. The MR fluids, used for the polishing, consist of DI water based carbonyl iron (CI), nonmagnetic polishing micro abrasive, and required amount of stabilizers. In the process, mixed fluids were supplied into the gap between a rotating wheel (with electromagnetic field) and the workpiece. Then, the micro abrasives contained in the fluids perform material removal action from the workpiece. Such material removal mechanism in the MR polishing is considered as a process governed by the Bingham flow in the contact zone. In this study, generated surface integrities of SUS 304 using MR polishing process was investigated through a series of experiments. And electro-polishing(EP) process was adopted to reduce the micro-scratch after the MR polishing. The morphology of the generated surface is also observed by scanning electron microscope(SEM).
반도체 제조 설비용 전해 연마된 STS316L 용접강관의 표면 성질 -전해 조건과 표면 성상의 관계를 중심으로-
김기호 ( Ki Ho Kim ),조보연 ( Bo Yeon Cho ) 충북대학교 산업과학기술연구소 2007 산업과학기술연구 논문집 Vol.21 No.2
316L stainless steel welding tube was electrolytically polished and the inner surface characteristics of the tube were tested. Electro-polishing variables such as current, voltage, concentration of electrolyte and electro-polishing time were changed to seek for optimum condition. These makes a optimum conditions for the electro-polishing as 4000A, 9V, 1.7 specific gravity of electrolyte, 30minute of electro-polishing time. It resulted as the surface roughness of Ra< 0.25μm. XPS resulted as the ratio of CrO/FeO equals or more to 3/1. AES resulted as the thickness of CrO film of 38Å. DTA resulted as the tube did not react with N2, H2 and O2 gas till 1073K. As summarize above results, the electro-polished 316L stainless steel welding tube satisfied the conditions to apply as a pipeline for semi- conductor production facility and clean room.
반도체 제조 설비용 전해 연마된 STS316L 용접강관의 표면 성질
김기호(Kiho Kim),조보연(Boyeon Cho) 한국표면공학회 2008 한국표면공학회지 Vol.41 No.1
316L stainless steel welding tube was electrolytically polished and the inner surface characteristics of the tube were tested. Electro-polishing variables such as current, voltage, concentration of electrolyte and electro-polishing time were changed to seek for optimum condition. These makes a optimum conditions for the electro-polishing as 4000 A, 9V, 1.7 specific gravity of electrolyte, and 30 minute of electro-polishing time. It makes the surface roughness as Ra < 0.25 ㎛. XPS test resulted as the ratio of CrO/FeO equals or more to 3/1. AES test resulted as the thickness of CrO film of 38Å. DTA test resulted as the tube did not react with N₂, H₂, and O₂ gas below 1073K. As summarize above results, the electro- polished 316L stainless steel welding tube satisfied the conditions to apply as a pipeline for semi- conductor production facility and clean room.
이재종,이응숙,황경현,민승기 한국공작기계학회 2002 한국공작기계학회 춘계학술대회논문집 Vol.2002 No.-
In the recent, electro-rheological fluid has been used for micro polishing of the 3-dimensional micro-aspherical lens and some sectional parts with defects on the wide flat wafer. The ER fluid has the properties that its viscosity has drastic changed under some electric fields. Therefore, ER fluid can be applicable to the micro polishing for some parts using these properties. In this paper, the experimental device has been constructed using the precision milling machine in order to micro polishing for some sectional parts of a 4 inches wafer. It is consisted of a small steel electrode, a wafer fixture, DC10mA and 5KV power supply unit, and a controller unit. Using the ER experimental device, possibility of amending for wide flat wafer and micro polishing of some micro part has been analyzed.
곽태수(Tae-Soo Kwak),곽재섭(Jae-Seob Kwak) Korean Society for Precision Engineering 2012 한국정밀공학회지 Vol.29 No.3
This paper has aims to share fundamental knowledge for magnetic abrasive polishing and to mainly introduce recent research results. In order to enhance a magnetic flux density for nonferrous materials, advanced magnetic abrasive polishing system which is called 2nd generation system was established by electro-magnet array table, and the effectiveness of the electromagnet array table was evaluated in real polishing experiments. To increase adhesiveness of the abrasives in high speed polishing, a silicone gel agent was proposed and carbon nanotube particles as new magnetic abrasives were applied in the magnetic abrasive polishing. In addition, a strategy for optimal step-over determination by heuristic algorithm was introduced for applying large size workpiece. Curved surfaces having a uniform radius were simulated and tested with installed electro-magnet array table.
마이크로 연료전지 분리판 유동 채널의 전해디버링 특성에 관한 연구
김동준(Kim Dong Joon),김건희(Kim Gun Hee),조명우(Cho Myeong Woo) 한국생산제조학회 2009 한국공작기계학회 추계학술대회논문집 Vol.2009 No.-
In this research, a study about deburring using electro-polishing describes the optimal condition selecting fuel-cell bipolar plates. Deburring using electro-polishing is necessary to obtain high quality metal bipolar plates for fuel-cell. In addition, deburring using electro-polishing improve corrosion resistance and passivity. The experiments was conducted for optimal condition and analyzed by scanning electron microscope(SEM).
EGL 공정용 컨덕터 롤 폴리셔 수명 예측에 관한 연구
구자경(Ja-Kyung Ku),고종민(Jong-Min Ko),구태완(Tae-Wan Ku),강범수(Beom-Soo Kang) Korean Society for Precision Engineering 2011 한국정밀공학회지 Vol.28 No.9
In electro-galvanizing line to manufacture the electro-galvanized steel sheet, polishing system is required to maintain clean surface of conductor roll and to secure the quality of the steel sheet. At the same time, prediction and decision of the replacement cycle for felt material and its brush installed in the polishing system is also important because the brush is directly contacted on the conductor roll surface. In this study, the polishing system has been designed which the brush is repetitive translating according to the longitudinal direction of the conductor roll. Furthermore, the prediction on the wear-life of the felt material used for the brush is performed using the contact pressure extracted by finite element analysis. And to verify the predicted wear-life of the felt material, the experimental study is also carried out. From the comparison result between the predicted and the measured wear-life of the felt material, it is presented that the wear-life and the replacement cycle of the felt material are well predicted by considering a wear compensation factor, and the wear compensation factor is useful and reasonable.