http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
유리기판에 O2 플라즈마 표면처리 후 제작된 ITO 박막의 특성
채홍철 ( Hong Chol Chae ),홍주화 ( Joo Wha Hong ) 대한금속재료학회 ( 구 대한금속학회 ) 2012 대한금속·재료학회지 Vol.50 No.7
The optical and electronic properties of Indium Tin Oxide (ITO) thin films deposited on a RFplasma treated glass substrate were investigated by X-Ray Photoelectron Spectroscopy (XPS), Ultra-violet Photoelectron Spectroscopy (UPS), Reflected Electron Energy Loss Spectroscopy (REELS). The modification of glass substrates was carried out by varying the time of the plasma surface treatment in an oxygen atmosphere. The focus of this research was to examine how the optical and electronic properties of ITO thin films change with the plasma treatment time. The surface energy increased since the carbon bonds were removed from the surface after the glass substrate received the surface treatment. The ITO thin films produced on the glass substrate with surface treatment showed that the high optical transmittance was approximately 85%. The measured band gap energy was as high as 3.23 eV when the plasma treatment time was 60 s and the work function after the treatment was increased by 0.5 eV in comparison to that before the treatment of 60 s. The ITO thin film exhibited an excellent sheet resistance of 2.79 Ω/□. We found that the optical and electronic properties of ITO thin films can be improved by RF-plasma surface treatment.
채홍철 ( Hong Chol Chae ),백창현 ( Chang Hyun Baeg ),홍주화 ( Joo Wha Hong ) 대한금속재료학회(구 대한금속학회) 2011 대한금속·재료학회지 Vol.49 No.2
The multi-layered thin film with an ITO/Ag/ITO structure was produced on PET by using magnetron reactive sputtering method. First, 30 nm of ITO thin film was coated on PET by using normal temperature process. Then 20-52 nm of the Ag thin film was coated. Lastly, 30 nm of ITO thin film was coated on Ag layer. The sample of the 20 nm Ag thin film showed more than 70% transmission and a 2.7Ω/□ sheet resistance. When compared to the existing single-layered transparent conducting thin film, multi-layered film was found to be superior with about 5Ω/□ less sheet resistance. However, since the Ag layer became thinner, the band gap energy needs to be increased to more than 3.5 eV.
채홍철 ( Hong Chol Chae ),우성용 ( Woo Seong Yong ),홍주화 ( Joo Wha Hong ) 대한금속재료학회(구 대한금속학회) 2015 대한금속·재료학회지 Vol.53 No.9
Influences of surface oxygen plasma treatment on the work function of ITO thin films were studied. As a result of plasma etching, the roughness of the film was reduced with increasing plasma treatment time. The REELS measurement with primary electron energy of 300eV revealed that the band gap of the extreme surface of the thin film was increased by 1.03eV. At 1700eV, however, the band gap of the film remained unchanged. The UPS results indicated that the work function increased by 0.82eV and from the XPS spectra the valence band maximum was measured to be 5.32eV after the plasma treatment. The change in the work function of the extreme surface of the film was attributed to an increase in the amount of oxygen after the plasma treatment, which did not affect the electrical conductivity or the value of the band gap. XPS was used to examine whether the oxygen plasma treatment caused any change in the composition ratio of the ITO thin film. The spectra showed that almost all of the peaks for the carbon compounds of C-H-O were eliminated after the plasma treatment. In addition, In-O bonds and O=O bonds were increased as a result of abundant oxygen in the surface of the film. Our results demonstrated that the electronic, optical, and structural properties of plasma-treated ITO thin films in an oxygen environment were greatly improved.
이만영(Man Young Lee),승기배(Ki Bae Seung),김종진(Jong Jim Kim),노태호(Tae Ho Rho),채장성(Jang Seong Chae),김종상(Jong Sang Kim),홍순조(Soon Jo Hong),최규보(Kyu Bo Chol) 대한내과학회 1990 대한내과학회지 Vol.39 No.6
N/A To evaluate the clinical differences between Q wave myocardial infarction and non-Q wave myocardial infarction, the records of 336 patients with first myocardial infarction were reviewed. According to the presence or absence of Q waves on electrocardiogram, the patients were divided into two groups: a Q wave myocardial infarction group and a non-Q wave myocardial infarction group. The results were as follows: 1) According to standard electrocardiographic criteria, among 336 patients 271 patients (80.6%) had Q wave myocardial infarctions, and 65 patients (19.4%) had non-Q wave myocaridal infarctions. 2) The average age and male-to-female ratio were similar in the two groups. There were no significant differencres between the two groups in serum cholesterol levels and in incidences of a history of hypertension and diabetes mellitus. 3) Peak cardiac enzyme levels of CPK and LDH were significantly higher in the Q wave myocardial infarction group than in the non-Q-wave myocardial infarctions group. 4) When the complications of arrythmia, congestive heart failure and hospital mortality were compaired, incidences of AV block and congestive heart failure were significantly higher in the Q wave myocardial infarction group, but there was no difference in hospital mortality between the two groups. 5) Incidences of recurrent angina, congestive heart failure, reinfarction, death, and cause of death were not different statistically between the two groups, even though there was a tendency to have more recurrent angina and reinfarction in the non-Q wave myocardial infarction group and more congestive heart failure in the Q wave myocardial infarction group.