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Si 기판에서 원자층 화학 기상 증착법으로 제조된 Al<sub>2</sub>O<sub>3</sub> 및 ZrO<sub>2</sub> 유전 박막의 결정학적 특성 및 계면 구조 평가
김중정,양준모,임관용,조홍재,김원,박주철,이순영,김정선,김근홍,박대규,Kim, Joong-Jung,Yang, Jun-Mo,Lim, Kwan-Yong,Cho, Heung-Jae,Kim, Won,Park, Ju-Chul,Lee, Soun-Young,Kim, Jeong-Sun,Kim, Geun-Hong,Park, Dae-Gyu 한국재료학회 2003 한국재료학회지 Vol.13 No.8
Crystallographic characteristics and interfacial structures of $Al_2$$O_3$and $ZrO_2$dielectric films prepared by atomic layer chemical vapor deposition (ALCVD) were investigated at atomic scale by high-resolution transmission electron microscopy (HRTEM) and energy dispersive X-ray spectroscopy (EDS)/electron energy-loss spectroscopy (EELS) coupled with a field-emission transmission electron microscope. The results obtained from cross-sectional and plan-view specimens showed that the $Al_2$$O_3$film was crystallized by annealing at a high temperature and its crystal system might be evaluated as either cubic or tetragonal phase. Whereas the $ZrO_2$film crystallized during deposition at a low temperature of ∼$300^{\circ}C$ was composed of both tetragonal and monoclinic phase. The interfacial thickness in both films was increased with the increased annealing temperature. Further, the interfacial structures of X$ZrO_2$$O_3$and $ZrO_2$films were discussed through analyses of EDS elemental maps and EELS spectra obtained from the annealed films, respectively.
석회 안정화 슬러지와 플라이 애쉬 혼합재의 매립지 복토재로의 이용타당성세 대한 연구
김영관,조홍재 江原大學校 附設 環境硏究所 1996 環境硏究 Vol.13 No.-
Feasibility of using the mixture of a lime-stabilized municipal wastewater sludge and the fly ash as a landfii cover matetial was studied. the mixnures were prepared by varying mixing ratios. and their geotechnical propertes were experimentally determined. The appropriate mixing ratio of lime : sludge : fly ash for stabilization. which was the ratio to hold the pH of sludge-fly ash mixture above 12.0 for at least 2 hours with containing the fly ash content as much as possible. was 5 : 15 : 80. Plasticity index(PI) of the mixture drastically decreased at a sludge content less than 60% Maximum dry density linearly increased with fly ash. In the direct shear test the sludges were found to have an internal friction angle of 30.2" and a cohesion of 0.3kg/㎤. The internal friction angle of the mixture was found to increase with increasing fly ash content. Results of the consolidation tests showed that addition of fly ash to the sludge decreased both compression index and the secodary consolidation coefifcient while it increased the consolidation coefficient. In permeability tests using a consolidometer. permeability of 1 X10^(-7)㎝/s.I which is required in U.S. EPA standard as a landfill liner. was attained indicating a possibility of using the tested mixture as a landfill cover material.