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질소 이온주입법에 의한 BN 박막의 계면구조 개선 및 밀착력 향상
변응선(E. Byon),이성훈(S.H. Lee),이상로(S.R. Lee),이구현(K.H. Lee),한승희(S.H. Han),이응직(E.J. Lee),윤재홍(J.H. Youn) 한국진공학회(ASCT) 1999 Applied Science and Convergence Technology Vol.8 No.2
ME-ARE법에 의해 합성된 c-BN 박막의 초기성장층 및 이의 계면구조를 개선하고 밀착력을 향상시키고자 후처리로서 질소이온을 주입 (PSII-N^+)하였다. 이온 주입량이 c-BN 박막의 미세구조, 계면구조에 미치는 영향에 대하여 조사하였으며 이와 함께 박막의 경도 및 박리특성에 미치는 효과를 고찰하였다. 질소이온 주입시 약 5.0×10^(15)atoms/㎠ 이상의 주입량에서부터 IR스펙트럼의 변화가 보이기 시작하였으며 5.0×10^(16)atoms/㎠ 이상의 주입량 이상에서부터 급격한 c-BN→ h-BN 상전환이 일어났다. HRTEM관찰 결과, 이온주입에 의해, sp² 결합을 하고 있는 취약한 초기성장층의 결정구조 개선을 확인할 수 있었으며 이온주입된 박막의 경도 및 박리거동을 비교하여 이온주입 및 주입량에 따른 경도 및 박리 상관관계를 설명하였다. The post ion implantation has been applied to modify early-grown BN layer and improve the adhesion of the BN films. The effect of ion implantation doses on microstructure and interlayer was investigated by FTIR and HRTEM. And the hardness and delamination life time of N^+-implanted BN films were measured. With increasing the ion dose up to 5.0×10^(16)atoms/㎠, the change of IR spectrum is observed. At 5.0×10^(16) atoms/㎠, a drastic transition of cubic phase into hexagonal phase is detected. The change of microstructure of early-grown layers by ion implantation is confirmed using HRTEM. Both microhardness and delamination life time of BN films increase with ion dose. The modification model of early-grown BN layers is briefly discussed based on the displacement per atom and excess boron in the BN film induced by ion irradiation.
반응석출법에 의해 피복된 TiC의 경화거동에 관한 연구
남기석,변응선,이구현,김도훈( K . S . Nam,E . S . Byon,G . H . Lee,D . H . Kim ) 한국열처리공학회 1994 熱處理工學會誌 Vol.7 No.4
In this study, lattice parameter, binding energy and microstructures of TiC layer according to the addition of Fe, Cr were investigated in the reactive deposition coating. From the results, the lattice parameters of the TiC layers by using ferro-titanium as a precursor were 4.329∼4.339A but the lattice parameters of the TiC layers formed by ferro-titanium and ferro-chromium decreased to 4.316∼4.330Å. The hardness of the former`s was HV(100g) 3,000∼3,400㎏/㎜ and the hardness of the latter`s was HV(100g) 3,800∼3,900. But, regardless of Cr and Fe, the binding energy of TiC layers were 454.75 eV for Ti2p_(3/2) and were 281.85 eV for Cls. Meanwhile, the TiC layers were densified by addition of Fe, Cr and internal defects were reduced Therefore, it can be concluded that the remarkable hardness increment was obtained by the improvement of microstructures of TiC rather than the increase of bond strength or Peierls stress.
질소이온주입에 따른 생체안전성 티타늄 임플란트의 마모특성
변응선,최종운,손선희,정용수 한국산업안전학회 1999 한국안전학회지 Vol.14 No.4
In this study, plasma source ion implantation was used to improve the wear properties of biocompatible titanium implant. In order to observe the effect of ion energy and dose on wear property of titanium implant, pin-on-disk type wear tests in Hank's solution were carried out. The friction coefficient of ion implanted specimens were increased from 0.47 to 0.65 under high energy and ion dose conditions. As increasing ion energy and ion dose, the amount of wear was reduced.
TiN 박막의 경도 및 밀착력에 미치는 Pulsed DC PACVD 공정인자의 영향
윤재홍,이구현,변응선,김진관,이상로 國立 昌原大學校 産業技術硏究所 1997 産技硏論文集 Vol.11 No.-
Wear resistance TiN thin films have been widely used in machining and forming industries. In order to enhance wear resistance of TiN thin films, high hardness and adhesion to substrates are required. Tin films are ,in general, coated on cutting and/or forming tools by PACVD or PVD method, In this study, a pulsed DC PACVD method was employed to ignite and maintain the plasma during whole deposition process. The pulse on/off time ratio and pulse frequency were major deposition parameters that affected hardness and adhesion of TiN films. The hardness and adhesion of the TiN films were measured and discussed in a microstructural aspect to explain their effect. (200) preferred orientation, columnar growth and zone-I structure of the films resulted in a high hardness and a good adhesion to substrates.
Steam Turbine Nozzle용 12%Cr강의 Paste Boronizing 처리 및 고온표면특성에 관한 연구
조재현,손근수,윤재홍,김현수,이성훈,변응선,이의열,이선호,김인수 대한금속재료학회 2002 대한금속·재료학회지 Vol.41 No.2
12% Cr steel used for a nozzle in steam turbine was paste-boronized and its surface properties at high temperature were evaluated. Typical tooth structure, which consisted of outer layer of FeB and inner layer of Fe_2B, was observed at the boronized layer of the specimen and its activation energy was 286.7 kJ/mole. Cracks due to the difference of thermal expansion coefficient and brittleness of FeB layer were observed. Voids were also observed at tip area of tooth structure. Weight of the specimen exposed at 740℃ increased rapidly from the initial stage of oxidation. Iron oxide was mixed in chromium oxide at outer layer of the oxidized specimen, but chromium oxide and molybdenum were mixed in iron oxide at inner layer. Boronized specimen has shown excellent erosion resistance up to 20 times higher than that of non-treated specimen.