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김규만(Gyu Man Kim) Korean Society for Precision Engineering 2011 한국정밀공학회지 Vol.28 No.2
A high-resolution shadow mask, a nanostencil, is widely used for high resolution lithography. This high-resolution shadowmask is often fabricated by a combination of MEMS processes and focused ion beam (FIB) milling. In this study, FIB milling on 500-㎚-thin SiN membrane was tested and characterized. 500 ㎚ thick and 2x2 ㎜ large membranes were made on a silicon wafer by micro-fabrication processes of LPCVD, photolithography, ICP etching and bulk silicon etching. A subsequent FIB milling enabled local membrane thinning and aperture making into the thinned silicon nitride membrane. Due to the high resolution of the FIB milling process, nanoscale apertures down to 60 ㎚ could be made into the membrane. The nanostencil could be used for nanoscale patterning by local deposition through the apertures.
Epoxy Resin/ESO(Epoxidized Soybean Oil)의 혼합 함량에 따른 열적, 기계적, 전기적 절연파괴 특성 연구
김규만(Gyu- Man Kim),김수환(Soo-Hwan Kim),김정철(Jeong-Cheol Kim),김회창(Hoe-Chang Kim),문명진(Myeong-Jin Moon),배승열(Seung-Yeol Bae),변주희(Joo-Hee Byun),신규철(Gyu-Cheol Shin),이형원(Hyoung-Won Lee),전완수(Wan-Su Jeon),박재준(Jae- 대한전기학회 2022 대한전기학회 학술대회 논문집 Vol.2022 No.7
김규만(Gyu Man Kim),정성일(Sung Ill Chung),오현석(Hyeon-Seok Oh) Korean Society for Precision Engineering 2006 한국정밀공학회지 Vol.23 No.3
A high-resolution shadow mask, or called a nanostencil was fabricated for high resolution lithography. This high-resolution shadow mask was fabricated by a combination of MEMS processes and focused ion beam (FIB) milling. 500 run thick and 2×2 ㎜ large membranes were made on a silicon wafer by micro-fabrication processes of LPCVD, photolithography, ICP etching and bulk silicon etching. A subsequent FIB milling enabled local membrane thinning and aperture making into the thinned silicon nitride membrane. Due to the high resolution of the FIB milling process, nanoscale apertures down to 70 ㎜ could be made into the membrane. By local deposition through the apertures of nanostencil, nanoscale patterns down to 70 ㎜ could be achieved.
김규만(Gyu Man Kim),유르겐 부르거(Juergen Brugger) Korean Society for Precision Engineering 2004 한국정밀공학회지 Vol.21 No.8
A new tool of surface patterning technique for general purpose lithography was developed based on shadow mask method. This paper describes the fabrication of a new type of miniaturized shadow mask. The shadow mask is fabricated by photolithography and etching of 100-㎜ full wafer. The fabricated shadow mask has over 388 membranes with apertures of micrometer length scale ranging from 1 ㎛ to 100s ㎛ made on each 2㎜×2㎜ large low stress silicon nitride membrane. It allows micro scale patterns to be directly deposited on substrate surface through apertures of the membrane. This shadow mask method has much wider choice of deposit materials, and can be applied to wider class of surfaces including chemical functional layer, MEMS/NEMS surfaces, and biosensors.
하지동맥 폐쇄환자에서 실시한 Extra-anatomic bypass술의 임상적 고찰
김규만,김종원,Kim, Gyu-Man,Kim, Jong-Won 대한흉부심장혈관외과학회 1993 Journal of Chest Surgery (J Chest Surg) Vol.26 No.12
Extra-anatomic bypass was proposed by Freeman in 1952 and has been used for patient with lower extremity arterial occlusion who had very high operative risk, especially elderly or severly illed patient.We had performed 14 cases of extra-anatomic bypasses from Jan. 1991 till July 1993 and having been following up them. Their results were summarized as follow. Among total 14 patients, 13 was male. Their mean age was 64.8 years old, ranged from 48 to 80. The most common complaint was pain on lower limb and they visited hospital 6.1 months in average after onset of symptom. Frequently, they were associated with systemic diseases such as generalized atherosclersis, hypertension, diabetes mellius, etc. Axillary artery was used as donor artery in 8 cases and crossover femoro-femoral or femoro-popliteal bypass was performed in 6 cases. Postoperative complications were notedd in 8 cases so their morbidity rate was 42.8%. Except for two contraindicated cases, one or more anticoagulants were used routinely . Among them, combined use of aspirin and persantine was most commonly applied.After bypass graft, nine cases were occluded beteween 10 and 53 months. So their average duration of freedom from reocclusion was 35.7 months and 3-year patency rate was 63%.