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- 저자 : Zhenyang Wang (검색결과 2 건)
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Synthesis of CeO2 Nanoparticles Derived by Urea Condensation for Chemical Mechanical Polishing
Zhenyang Wang,Tongqing Wang,Lifei Zhang,Xinchun Lu 대한금속·재료학회 2023 ELECTRONIC MATERIALS LETTERS Vol.19 No.6
The synthesis of CeO2 nanoparticles for CeO2 based slurry gains continuous emphasis on improving its performance in the chemical mechanical polishing of dielectric materials. Urea was selected to dominate the growth and morphology during the calcination process. Thermogravimetry experiments were used to analyze the the decomposition behavior. Particle morphology and size were analyzed. Crystalline phase information and surface valence were used to compare the differences in surface physical and chemical properties of ceria by different synthesis process. The CeO2 nanoparticles synthesized with urea were dispersed in water as slurry. The particle sizes of CeO2 were measured by dynamic light scattering. The Zeta potential of CeO2 dispersion were measured to show dispersing performance. The CeO2 nanoparticles synthesized with urea condensation show good monodisperse properties. The material removal rate of silicon oxide and surface quality after chemical mechanical polishing were selected to evaluate the chemical mechanical polishing performance. The CeO2 nanoparticles synthesized with urea condensation not only yielded better surface quality results than the commercial slurry but also showed a 153% (pH = 4) and 100% (pH = 10) increase in the material removal rate of silicon oxide compared to commercial.
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Incremental extended finite element method for thermal cracking of mass concrete at early ages
Zhenyang Zhu,Guoxin Zhang,Yi Liu,Zhenhong Wang 국제구조공학회 2019 Structural Engineering and Mechanics, An Int'l Jou Vol.69 No.1
Thermal cracks are cracks that commonly form at early ages in mass concrete. During the concrete pouring process, the elastic modulus changes continuously. This requires the time domain to be divided into several steps in order to solve for the temperature, stress, and displacement of the concrete. Numerical simulations of thermal crack propagation in concrete are more difficult at early ages. To solve this problem, this study divides crack propagation in concrete at early ages into two cases: the case in which cracks do not propagate but the elastic modulus of the concrete changes and the case in which cracks propagate at a certain time. This paper provides computational models for these two cases by integrating the characteristics of the extended finite element algorithm, compiles the corresponding computational programs, and verifies the accuracy of the proposed model using numerical comparisons. The model presented in this paper has the advantages of high computational accuracy and stable results in resolving thermal cracking and its propagation in concrete at early ages.
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