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베어링강의 경도에 따른 DLC박막의 트라이볼로지적 특성
박재홍(JaeHong Park),YoungGoo Jung,김석삼(SeockSam Kim) 한국트라이볼로지학회 2008 한국트라이볼로지학회 학술대회 Vol.2008 No.11
DLC (Diamond Like Carbon) films have predominant mechanical properties like a high hardness, low friction and high chemical resistance; therefore, DLC films are applied in a wide range of industry fields. Especially, we tribologically evaluated characteristics of DLC films deposited on bearing steel that is generally applied to mechanical parts such as Automobile and shipping building etc. We studied on the DLC films deposited on bearing steel (bearing steel) having different hardness. DLC films are deposited on bearing steel having different hardness by RF-PECVD (Radio Frequency - Plasma Enhanced Chemical Vapor Deposition) method. As interlayer, Si-interlayer is deposited on bearing steel to improve adhesion strength by RF -Sputtering method. The DLC film structures were analyzed with Raman spectra and evaluated to Gaussian function. And also, adhesion strength of DLC films was measured with a Scratch tester and we performed wear test with a Tribo-meter to measure coefficient of friction. As a result, DLC films deposited on bearing steel under same deposition condition have typical structure DLC films regardless of hardness of bearing steel. Adhesion strength of DLC film deposited on bearing steel is increased with a hardness of bearing steel. Friction coefficient of DLC film showed lower at the high hardness of bearing steel.