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Coherent diffraction surface imaging in reflection geometry
Marathe, Shashidhara,Kim, S. S.,Kim, S. N.,Kim, Chan,Kang, H. C.,Nickles, P. V.,Noh, D. Y. The Optical Society 2010 Optics express Vol.18 No.7
<P>We present a reflection based coherent diffraction imaging method which can be used to reconstruct a non periodic surface image from a diffraction amplitude measured in reflection geometry. Using a He-Ne laser, we demonstrated that a surface image can be reconstructed solely from the reflected intensity from a surface without relying on any prior knowledge of the sample object or the object support. The reconstructed phase image of the exit wave is particularly interesting since it can be used to obtain quantitative information of the surface depth profile or the phase change during the reflection process. We believe that this work will broaden the application areas of coherent diffraction imaging techniques using light sources with limited penetration depth.</P>
Coherent Diffraction Imaging Using Focused Hard X-rays
Sunam Kim,Sangsoo Kim,Su Yong Lee,Chan Kim,Yoonhee Kim,Do Young Noh,Shashidhara Marathe,Changyong Song,Marcus Gallagher-Jones,Hyon Chol Kang 한국물리학회 2016 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.68 No.9
A quantitative height profile image of a silicon nano-trench structure was obtained via coherent diffraction imaging (CDI) utilizing focused X-rays at a photon energy of 5.5 keV. The ability to optimize the spatial coherence and the photon flux density of a focused X-ray beam was the key technique for achieving such technical progress at a given X-ray photon flux. This was achieved by investigating the tunability of the focused beam’s optical properties and performing a CDI experiment with the focused X-rays. The relationship between the focused X-rays’ optical properties (e.g., photon flux density and spatial coherence length) and the incident beam’s size, which can be tuned by adjusting the slits in front of the Fresnel zone plate (FZP) was elucidated. We also obtained a quantitative image of a nano-trench sample produced via the reconstruction process of CDI, which utilizes carefully tuned, focused X-rays.