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RISS 인기검색어
- 검색키워드
- 저자 : Mamoru Mitsuishi (검색결과 4 건)
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Kim, Yangjin,Hibino, Kenichi,Kizaki, Toru,Sugita, Naohiko,Mitsuishi, Mamoru Elsevier 2017 Precision engineering Vol.48 No.-
<P><B>Abstract</B></P> <P>The absolute optical thickness and surface shape of optical devices are considered as the fundamental characteristics when designing optical equipment. The thickness and surface shape should be measured simultaneously to reduce cost. In this research, the absolute optical thickness and surface shape of a 6–mm-thick fused silica transparent plate of diameter 100mm was measured simultaneously by a three-surface Fizeau interferometer. A measurement method combining the wavelength tuning Fourier and phase shifting technique was proposed. The absolute optical thickness that corresponds to the group refractive index was determined by wavelength tuning Fourier analysis. At the beginning and end of the wavelength tuning, the fractional phases of the interference fringes were measured by the phase shifting technique and optical thickness deviations with respect to the ordinary refractive index and surface shape were determined. These two kinds of optical thicknesses were synthesized using the Sellmeier equation for the refractive index of fused silica glass, and the least square fitting method was used to determine the final absolute optical thickness distribution. The experimental results indicate that the all the measurement uncertainties for the absolute optical thickness and surface shape were approximately 3nm and 35nm, respectively.</P> <P><B>Highlights</B></P> <P> <UL> <LI> The absolute optical thickness and surface shape of a transparent plate were measured simultaneously using wavelength tuning. </LI> <LI> Two kinds of signal from interferogram were separated in the frequency domain using 4<I>N</I> − 3 phase shifting algorithm. </LI> <LI> 4<I>N</I> − 3 algorithm was used for compensating the phase shift errors and coupling errors. </LI> <LI> Two kinds of optical thicknesses were synthesized using Sellmeier equation and least square fitting. </LI> </UL> </P>
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Design and Assessment of Phase-Shifting Algorithms in Optical Interferometer
Sungtae Kim,Jurim Jeon,Yangjin Kim,Naohiko Sugita,Mamoru Mitsuishi 한국정밀공학회 2023 International Journal of Precision Engineering and Vol.10 No.2
Silicon wafers and transparent glass plates are major components in the semiconductor industry. In semiconductor devices, the surface shape and optical thickness of the wafers and glass plates are the key parameters for the optimal performance of the devices. Phase-shifting interferometry has been widely used to achieve precision measurements of these parameters. The phase-shifting algorithm significantly affects the interferometric measurement results with phase-shifting interferometry. In this review, we introduce the design and assessment of phase-shifting algorithms in the Fizeau interferometer. Section 2 categorized the phase-shifting algorithms designed by several methods in terms of their error compensation ability. Then, the optical setup of the Fizeau interferometer used for surface and thickness measurement is explained in Sect. 3. In addition, Sect. 4 explained the principle of phase extraction using phase-shifting interferometry and discussed its error sources. Moreover, design methods for the phase-shifting algorithm to eliminate error sources are introduced in Sect. 5. Finally, the error compensation abilities of designed algorithms are estimated by several methods in Sect. 6.
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Preliminary Study of Needle Tracking in a Microsurgical Robotic System for Automated Operations
Yusuke Kurose,Young Min Baek,Yuya Kamei,Shinichi Tanaka,Kanako Harada,Shigeo Sora,Akio Morita,Naohiko Sugita,Mamoru Mitsuishi 제어로봇시스템학회 2013 제어로봇시스템학회 국제학술대회 논문집 Vol.2013 No.10
Surgical needle tracking is an important element of high-level automated operations conducted by surgical robotic systems. However, conventional needle tracking algorithms lack robust performancewith different needle postures and are not applicable to the small needles used during microsurgery. This paper discusses a robust, efficient needle tracking algorithm, which is capable of estimating all of the positions and of the postures of a microsurgical needle. In the preoperative preparation stage, contour models of the microsurgical needle are generated using a 3-D CAD model and saved in a database. During the operation, the system extracts the contours of the microsurgical needle from the microscopic image using the edge and the color information. The system then calculates the likelihood of the contour models in the database bymatching the contours extracted fromthemicroscopic image. The experimental results indicated that our proposed method has high accuracy when tracking a microsurgical needle, and that it performed robustly with different needle postures.
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