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건식법으로 1-Octanethiol 코팅한 Cu 나노 분말 잉크의 잉크젯 인쇄 기술 적용
허재학,박신영,이선영,Her, Jae-Hak,Park, Shin-Young,Haque, Mominul Md.,Lee, Caroline Sun-Yong 한국분말야금학회 2011 한국분말재료학회지 (KPMI) Vol.18 No.4
Inkjet printing was successfully done using Cu nano powder ink after these Cu nano powders were dry-coated with 1-octanethiol for oxidation prevention. 1-octanethiol, which is Self-Assembled Multi-layers (SAMs), was coated approximately 10-nm thick on the surface of Cu nano powders. 1-Octanol, which has the same chain length as that for 1-octanethiol, was used as a solvent to make the ink for inkjet printing. As a result, the fabricated ink was dispersed for about 4 weeks, and after printing and heat treatment at $350^{\circ}C$ for 4 hours, the resistivity for the printed pattern was measured to be $1.15{\times}10^{-5}{\Omega}{\cdot}cm$.
김영식,장성수,이선영,진원혁,조일주,남효진,부종욱,Kim Young-Sik,Jang Seong-Soo,Lee Caroline Sun-Young,Jin Won-Hyeog,Cho Il-Joo,Nam Hyo-Jin,Bu Jong-Uk 정보저장시스템학회 2006 정보저장시스템학회논문집 Vol.2 No.2
In this research, a wafer-level transfer method of cantilever away on a conventional CMOS circuit has been developed for high density probe-based data storage. The transferred cantilevers were silicon nitride ($Si_3N_4$) cantilevers integrated with poly silicon heaters and piezoelectric sensors, called thermo-piezoelectric $Si_3N_4$ cantilevers. In this process, we did not use a SOI wafer but a conventional p-type wafer for the fabrication of the thermo-piezoelectric $Si_3N_4$ cantilever arrays. Furthermore, we have developed a very simple transfer process, requiring only one step of cantilever transfer process for the integration of the CMOS wafer and cantilevers. Using this process, we have fabricated a single thermo-piezoelectric $Si_3N_4$ cantilever, and recorded 65nm data bits on a PMMA film and confirmed a charge signal at 5nm of cantilever deflection. And we have successfully applied this method to transfer 34 by 34 thermo-piezoelectric $Si_3N_4$ cantilever arrays on a CMOS wafer. We obtained reading signals from one of the cantilevers.