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Donghyun Shim,Gwangseo Park,Jaemoon Pak,Kuangwoo Nam 한국물리학회 2005 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.47 No.2
Pb(Zr,Ti)O3 (PZT) films with Zr/Ti ratio of 50 : 50 were prepared by spin-casting at 3000 rpm for 30 sec on Pt/Ti/SiO2/Si substrates. After standard processing procedure, three different methods of annealing were conducted at 600C : a single-step process carried out in (a) air, and (b) O2 ambient, and (c) a 2-step process carried out in air, followed by an O2 annealing process. These films were highly oriented along the (111) direction with large remnant polarization and low coercive voltage values. The films treated in O2 had relatively larger polarization values, but the 2-step-annealed films possessed lower coercive voltage. Fatigue measurements were conducted until 1 × 1010 switching cycles, resulting in abnormal switching characteristics for these films. A comparative study on the ferroelectric and fatigue properties will be emphasized.